Agilent B1500 User’s Guide, Edition 7 2- 55
Introduction
Specifications
Additional errors (for SMU voltage output accuracy): ± 100 μV
(open load)
• DC bias monitor additional errors (open load):
± 20 mV, direct docking
± 30 mV, indirect docking
• Output impedance: 50 Ω, ty
pical
• DC output
resistance: 50 Ω (CMU bias), 130 Ω (S
MU bias)
• Measurement accuracy
Impedance measurement error is given by adding the following
additional err
or Ee to the MFCMU measurement error.
Ee = ± (A + Zs / |Zx| + Yo× |Zx| ) × 100 (%)
Zx:
Impedance measurement value (Ω)
A: 0.05 % (direct docking) or 0.1 % (indirect docking)
Zs: 500 ×
(1 + f ) mΩ (f: freque
ncy in MHz)
Yo: 1 + f × 10 nS (dire
ct docking, × 2 for indirect docking)
When the measurement terminals are extended by using
the
measurement cable, the measurement accuracy is applied to the data
measured after performing the open/short/load correction at the DUT
side cable end.
Specification conditions:
• Temperature: 23 °C ± 5 °C
• Integration time: 1 PLC or 16 PLC
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