Agilent Technologies B1500A Betriebsanweisung

Agilent TechnologiesAgilent B1500ASemiconductor Device AnalyzerUser’s Guide

PRECAUTIONS POUR COMMOTION A HAUTE TENSIONUne tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/ HRSMU; 100 Vdc) émanant du dispositi

2- 52 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsTable 2-28 Example of calculated C/G measurement accuracyFrequencyMeasured Capaci

Agilent B1500 User’s Guide, Edition 7 2- 53IntroductionSpecificationsSCUU/GSWUSCUU: SMU CMU Unify UnitGSWU: Guard Switch UnitThe SCUU multiplexes the

2- 54 Agilent B1500 User’s Guide, Edition 7IntroductionSpecifications• SCUU supplemental information•SMU pathOffset current: < 20 fAOffset voltage:

Agilent B1500 User’s Guide, Edition 7 2- 55IntroductionSpecificationsAdditional errors (for SMU voltage output accuracy): ± 100 μV (open load)• DC bia

2- 56 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsHV-SPGUHV-SPGU: High Voltage Semiconductor Pulse Generator Unit• Number of output

Agilent B1500 User’s Guide, Edition 7 2- 57IntroductionSpecificationsTable 2-29 Pulse range and pulse parameterItemValue aa. Unless otherwise stated,

2- 58 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsTable 2-30 Pulse/DC output voltage and accuracy• ALWG (arbitrary linear waveform

Agilent B1500 User’s Guide, Edition 7 2- 59IntroductionSpecifications• Programmable timing range: 10 ns to 10 s, 10 ns resolution• SPGU supplemental i

2- 60 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsSelectorAgilent 16440A SMU/pulse generator selector switches either a SMU or PGU

Agilent B1500 User’s Guide, Edition 7 2- 61IntroductionSpecificationsWGFMU/RSUWGFMU: Waveform Generator/Fast Measurement UnitRSU: Remote-sense and Swi

Achtung! Gefährliche SpannungVon den Geräten Agilent B1500 können Spannungen an den Anschlüssen “Force, Guard und Sense” von bis zu 200 V ausgehen. U

2- 62 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsThe V Monitor terminal outputs a buffered signal equal to 1/10 of the Output term

Agilent B1500 User’s Guide, Edition 7 2- 63IntroductionSpecificationsTable 2-31 Measurement functions, voltage forcing, voltage measurement, and curre

2- 64 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsTable 2-34 Voltage force accuracy, resolution, and timingTable 2-35 ALWG function

Agilent B1500 User’s Guide, Edition 7 2- 65IntroductionSpecificationsAgilent EasyEXPERT SoftwareFunctions• Operation mode• Application test mode• Clas

2- 66 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsMeasurement mode detailsAgilent B1500A supports the following measurement modes:•

Agilent B1500 User’s Guide, Edition 7 2- 67IntroductionSpecifications•CONSTA source unit can be set as a constant voltage or current source depending

2- 68 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsMeasurement time resolution: 100 μs• Standby modeSMUs in “Standby” remain program

Agilent B1500 User’s Guide, Edition 7 2- 69IntroductionSpecifications• q: Electron charge, 1.602177E-19 C• k: Boltzman’s constant, 1.380658E-23• ε (e)

2- 70 Agilent B1500 User’s Guide, Edition 7IntroductionSpecifications• Read out functionsThe read out functions are built-in functions for reading var

Agilent B1500 User’s Guide, Edition 7 2- 71IntroductionSpecifications•Trigger I/OOnly available using GPIB FLEX commands.Trigger in/out synchronizatio

Precautionary StatementAgilent B1500 Semiconductor Device Analyzer operates in the Microsoft Windows XP Professional environment. Agilent B1500 requir

2- 72 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsAgilent Desktop EasyEXPERT SoftwareDesktop EasyEXPERT is the same software that i

Agilent B1500 User’s Guide, Edition 7 2- 73IntroductionSpecifications• Automatic data exportDesktop EasyEXPERT has the ability to automatically export

2- 74 Agilent B1500 User’s Guide, Edition 7IntroductionSpecifications• Supported instruments:B1500A, 4155B, 4156B, 4155C, and 4156CSupported 4155/4156

Agilent B1500 User’s Guide, Edition 7 2- 75IntroductionSpecificationsGeneral Specifications• Temperature rangeOperating +5 °C to +40 °CStorage -20 °

2- 76 Agilent B1500 User’s Guide, Edition 7IntroductionAccessories and OptionsAccessories and Options Agilent B1500A is furnished with the following a

Agilent B1500 User’s Guide, Edition 7 2- 77IntroductionAccessories and OptionsTable 2-36 lists the options and the available accessories for Agilent B

2- 78 Agilent B1500 User’s Guide, Edition 7IntroductionAccessories and OptionsE5288A Atto Sense and Switch Unit (ASU)E5288A-001 Add triaxial and D-sub

Agilent B1500 User’s Guide, Edition 7 2- 79IntroductionAccessories and Options16442B Test fixture16442B-010 Add triaxial cables, 1.5 m, 4 ea.16442B-01

2- 80 Agilent B1500 User’s Guide, Edition 7IntroductionAccessories and Options16493G Digital I/O connection cable16493G-001 1.5 m length16493G-002 3 m

Agilent B1500 User’s Guide, Edition 7 2- 81IntroductionAccessories and Options16493R Accessories for WGFMU16493R-001 60 cm cable between WGFMU and RSU

Working in ComfortTo optimize your comfort and productivity, it is important that you set up your work area correctly and use your instrument properly

2- 82 Agilent B1500 User’s Guide, Edition 7IntroductionAccessories and Options16495F Connector plate w/ 12×triax., Interlock, GNDU16495F-001 Bulkhead

3 Installation

3- 2 Agilent B1500 User’s Guide, Edition 7InstallationThis chapter describes how to install Agilent B1500A and accessories.• “Requirements”• “Inspecti

Agilent B1500 User’s Guide, Edition 7 3- 3InstallationRequirementsRequirements This section contains information on:• “Power Requirements”• “Operating

3- 4 Agilent B1500 User’s Guide, Edition 7InstallationRequirementsVentilation Requirements The B1500A has cooling fans. To ensure adequate airflow, ma

Agilent B1500 User’s Guide, Edition 7 3- 5InstallationRequirements• Plug: BS 1363/A, 250 V, 10 A• Cable: 8120-4420, 8120-1351• Plug: AS 3112, 250 V, 1

3- 6 Agilent B1500 User’s Guide, Edition 7InstallationInspection and InstallationInspection and InstallationThis section describes what to do when you

Agilent B1500 User’s Guide, Edition 7 3- 7InstallationInspection and InstallationTo Perform Initial SetupAfter you receive the B1500A, perform the fol

3- 8 Agilent B1500 User’s Guide, Edition 7InstallationInspection and Installation15. For the message Thank you!, select the Finish button.The initial

Agilent B1500 User’s Guide, Edition 7 3- 9InstallationInspection and InstallationTo Change Windows Logon SettingAgilent B1500A initially enables Windo

• Performing an activity in an awkward or unnatural posture.• Maintaining static posture for prolonged periods.• Failing to take frequent short breaks

3- 10 Agilent B1500 User’s Guide, Edition 7InstallationInspection and InstallationTo Enable System ControllerTo allow Agilent B1500A/EasyEXPERT to con

Agilent B1500 User’s Guide, Edition 7 3- 11InstallationInstalling AccessoriesInstalling Accessories This section describes how to install the B1500A a

3- 12 Agilent B1500 User’s Guide, Edition 7InstallationInstalling AccessoriesTo Connect 16442B Test FixtureSee this section if you use Agilent 16442B

Agilent B1500 User’s Guide, Edition 7 3- 13InstallationInstalling AccessoriesTable 3-1 To Connect 16442BCables 16442B Terminals B1500A Terminals Agile

3- 14 Agilent B1500 User’s Guide, Edition 7InstallationInstalling AccessoriesTo Connect Connector Plate The available connector plates are listed in T

Agilent B1500 User’s Guide, Edition 7 3- 15InstallationInstalling AccessoriesTable 3-3 To Connect Connector PlateCables Connector PlateB1500A Terminal

3- 16 Agilent B1500 User’s Guide, Edition 7InstallationInstalling AccessoriesConnecting the interlock terminalThe B1500A provides the Interlock connec

Agilent B1500 User’s Guide, Edition 7 3- 17InstallationInstalling AccessoriesTo Connect ASUAgilent E5288A Atto Sense and Switch Unit (ASU) will add th

3- 18 Agilent B1500 User’s Guide, Edition 7InstallationInstalling AccessoriesTo install ASU 1. Fix the ASU in the shielding box. The ASU must be fixed

Agilent B1500 User’s Guide, Edition 7 3- 19InstallationInstalling AccessoriesFigure 3-2 To Connect ASUFigure 3-3 To Set Shorting Bar&085HWXUQ$8;

In This Manual This manual describes the front panel operation, installation, and functions of Agilent Technologies B1500. This manual consists of the

3- 20 Agilent B1500 User’s Guide, Edition 7InstallationInstalling AccessoriesTo connect MFCMU/4284A to AUXPerform the following procedure to connect t

Agilent B1500 User’s Guide, Edition 7 3- 21InstallationInstalling AccessoriesTo Connect SCUU/GSWUAgilent N1301A-100 SMU CMU Unify Unit (SCUU) is used

3- 22 Agilent B1500 User’s Guide, Edition 7InstallationInstalling AccessoriesTo install 16495K Fix your necessary 16495 connector plates to the shield

Agilent B1500 User’s Guide, Edition 7 3- 23InstallationInstalling AccessoriesTo connect SCUU/GSWU 1To attach the SCUU to the B1500A:1. Attach the SCUU

3- 24 Agilent B1500 User’s Guide, Edition 7InstallationInstalling Accessories2. Fix the SCUU inside or outside the shielding box. The SCUU must be fix

Agilent B1500 User’s Guide, Edition 7 3- 25InstallationInstalling AccessoriesTo Connect GNDU AdapterThe ground unit (GNDU) output is the single triaxi

3- 26 Agilent B1500 User’s Guide, Edition 7InstallationInstalling AccessoriesTo Interconnect SPGUsIf multiple SPGUs have been installed, connect the S

Agilent B1500 User’s Guide, Edition 7 3- 27InstallationMounting ConnectorsMounting Connectors Previous sections described how to install the available

3- 28 Agilent B1500 User’s Guide, Edition 7InstallationMounting ConnectorsTable 3-5 Recommended Parts Table 3-6 Dimensions of Connector Holes Usage A

Agilent B1500 User’s Guide, Edition 7 3- 29InstallationMounting ConnectorsTo Make an Interlock Circuit The interlock circuit is designed to prevent e

NOTE To get the latest firmware/software/electronic manuals/support information, visit Agilent Technologies support site (http://www.home.agilent.com)

3- 30 Agilent B1500 User’s Guide, Edition 7InstallationMounting ConnectorsInstalling the interlock circuitInstall the interlock circuit as follows:1.

Agilent B1500 User’s Guide, Edition 7 3- 31InstallationMounting ConnectorsFigure 3-10 Dimensions of the Interlock Switch (Agilent part number 3101-030

3- 32 Agilent B1500 User’s Guide, Edition 7InstallationMounting ConnectorsTo Connect GNDU Output The GNDU output connection examples are shown in Tabl

Agilent B1500 User’s Guide, Edition 7 3- 33InstallationMounting ConnectorsTo Connect SMU Output The SMU output connection examples are shown in Table

3- 34 Agilent B1500 User’s Guide, Edition 7InstallationMounting ConnectorsTable 3-8 SMU Output ConnectionsNOTE To Minimize Leakage CurrentFor the high

Agilent B1500 User’s Guide, Edition 7 3- 35InstallationMounting ConnectorsFigure 3-13 ASU Output Kelvin ConnectionThe ASU inputs can be connected to t

3- 36 Agilent B1500 User’s Guide, Edition 7InstallationMounting ConnectorsFigure 3-14 ASU Output non-Kelvin ConnectionThe ASU inputs can be connected

Agilent B1500 User’s Guide, Edition 7 3- 37InstallationMounting ConnectorsFigure 3-15 SCUU Output Kelvin ConnectionThe SCUU should be connected to the

3- 38 Agilent B1500 User’s Guide, Edition 7InstallationMounting ConnectorsFigure 3-16 SCUU Output non-Kelvin ConnectionThe SCUU should be connected to

Agilent B1500 User’s Guide, Edition 7 3- 39InstallationMounting ConnectorsTo Connect MFCMU OutputThe MFCMU output connection example is shown in Figur

Online DocumentsThe following electronic documentation files are stored in Agilent B1500’s internal hard disk drive. The files provide the information

3- 40 Agilent B1500 User’s Guide, Edition 7InstallationConnecting Measurement DevicesConnecting Measurement DevicesThis section describes how to conne

Agilent B1500 User’s Guide, Edition 7 3- 41InstallationConnecting Measurement DevicesUsing Test Fixture1. Press the Stop key to set the module output

3- 42 Agilent B1500 User’s Guide, Edition 7InstallationConnecting Measurement DevicesConnections for High Current MeasurementsWhen you force or measur

Agilent B1500 User’s Guide, Edition 7 3- 43InstallationConnecting Measurement DevicesUsing Connector PlateThis section provides the information useful

3- 44 Agilent B1500 User’s Guide, Edition 7InstallationConnecting Measurement DevicesGuarding Guarding reduces the leakage current between the measure

Agilent B1500 User’s Guide, Edition 7 3- 45InstallationConnecting Measurement DevicesTo Measure Low ResistanceWhen you measure a low resistance, high

3- 46 Agilent B1500 User’s Guide, Edition 7InstallationConnecting Measurement DevicesKelvin Connection Kelvin connections give good measurement result

Agilent B1500 User’s Guide, Edition 7 3- 47InstallationCapacitance Compensation When Using Switching MatrixCapacitance Compensation When Using Switchi

3- 48 Agilent B1500 User’s Guide, Edition 7InstallationCapacitance Compensation When Using Switching MatrixRequired ConditionsThe following conditions

Agilent B1500 User’s Guide, Edition 7 3- 49InstallationCapacitance Compensation When Using Switching MatrixIn Figure 3-18, C1 (DATA04), C2H (DATA05),

UtilitiesThe following utility programs are stored in Agilent B1500’s internal hard disk drive. For details, see “Application Library and Utilities” o

3- 50 Agilent B1500 User’s Guide, Edition 7InstallationCapacitance Compensation When Using Switching MatrixTo Create Compensation Data FileThis sectio

Agilent B1500 User’s Guide, Edition 7 3- 51InstallationCapacitance Compensation When Using Switching Matrix• For E5250A:The lines DATA05 to DATA08 sho

3- 52 Agilent B1500 User’s Guide, Edition 7InstallationCapacitance Compensation When Using Switching Matrix2. Measure the R, L, C values of the for C2

Agilent B1500 User’s Guide, Edition 7 3- 53InstallationCapacitance Compensation When Using Switching MatrixTo obtain compensation coefficientsObtain t

3- 54 Agilent B1500 User’s Guide, Edition 7InstallationCapacitance Compensation When Using Switching MatrixTable 3-11 Template Compensation Data Files

Agilent B1500 User’s Guide, Edition 7 3- 55InstallationMaintenanceMaintenanceMaintenance should be performed periodically to keep Agilent B1500A in go

3- 56 Agilent B1500 User’s Guide, Edition 7InstallationAbout Plug-in ModulesAbout Plug-in ModulesAgilent Technologies is responsible for the module in

Agilent B1500 User’s Guide, Edition 7 3- 57InstallationAbout Plug-in ModulesModule Type and LocationsModule locations when the B1500A is shipped from

3- 58 Agilent B1500 User’s Guide, Edition 7InstallationAbout Plug-in Modules

4 Using EasyEXPERT

Contents Agilent B1500 User’s Guide, Edition 71. Getting StartedTo Turn On/Off B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4- 2 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTThis chapter provides the reference information of Agilent EasyEXPERT software that is the g

Agilent B1500 User’s Guide, Edition 7 4- 3Using EasyEXPERTTo start EasyEXPERT, see “Start EasyEXPERT” on page 4-4 and “Workspace Configurator” on page

4- 4 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTStart EasyEXPERTStart EasyEXPERTThe Start EasyEXPERT window is displayed by selecting the St

Agilent B1500 User’s Guide, Edition 7 4- 5Using EasyEXPERTWorkspace ConfiguratorWorkspace ConfiguratorWorkspace means the space created in Agilent B15

4- 6 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTWorkspace ConfiguratorIf there is one workspaceYou will see a message asking you if you want

Agilent B1500 User’s Guide, Edition 7 4- 7Using EasyEXPERTWorkspace Configurator• No, I want to start a new session.This button must be selected if yo

4- 8 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTWorkspace ConfiguratorIf there are Workspace more than twoYou will see the message as shown

Agilent B1500 User’s Guide, Edition 7 4- 9Using EasyEXPERTWorkspace Configurator• Create a new WorkspaceThis button must be selected if you want to cr

4- 10 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTMain ScreenMain ScreenThe EasyEXPERT main screen will be displayed after the workspace is s

Agilent B1500 User’s Guide, Edition 7 4- 11Using EasyEXPERTMain ScreenMain Screen GUIFile menu Provides the following four functions.Import Test Setup

Notices© Agilent Technologies 2005, 2006, 2007, 2008No part of this manual may be reproduced in any form or by any means (including elec-tronic storag

Agilent B1500 User’s Guide, Edition 7ContentsAbout SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4- 12 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTMain ScreenData Display Opens “Data Display (page 4-51)” used to display the test result da

Agilent B1500 User’s Guide, Edition 7 4- 13Using EasyEXPERTMain ScreenCount Displays the number of single measurements executed for the test setup now

4- 14 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTMain ScreenOrganize Preset Group... Opens the “Organize Preset Group (page 4-33)” dialog b

Agilent B1500 User’s Guide, Edition 7 4- 15Using EasyEXPERTMain ScreenStandby ON This indicator is located at the bottom of the EasyEXPERT main screen

4- 16 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTMain ScreenShow All Append Data Check this function to see all test records created by the

Agilent B1500 User’s Guide, Edition 7 4- 17Using EasyEXPERTMain ScreenAuto Export Setting... Opens the “Test Results Data Auto Export (page 4-24)” di

4- 18 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTMain ScreenRun OptionThis dialog box appears by clicking the Run Option button and is used

Agilent B1500 User’s Guide, Edition 7 4- 19Using EasyEXPERTMain ScreenON Test result data of the same test setup name will be displayed on the exclus

4- 20 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTMain ScreenTiling Resize and collate the data display windows such that they fill up the e

Agilent B1500 User’s Guide, Edition 7 4- 21Using EasyEXPERTMain ScreenX/Y Axis Title Font size for the axis titleScale Font size for the X and Y coo

Contents Agilent B1500 User’s Guide, Edition 7To Connect 16442B Test Fixture. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4- 22 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTMain ScreenTest Results Data FilterThis dialog box appears by clicking Results > Filter

Agilent B1500 User’s Guide, Edition 7 4- 23Using EasyEXPERTMain ScreenTest Results Data Folder ExportThis dialog box appears by clicking Results >

4- 24 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTMain ScreenMy Format Custom format created by the specified XSLT filter. The following two

Agilent B1500 User’s Guide, Edition 7 4- 25Using EasyEXPERTMain Screen• Default Format: File name without extension is as follows.Setup Name[Device ID

4- 26 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTMain ScreenData Storage Remove a check from the following check box to disable the Auto Rec

Agilent B1500 User’s Guide, Edition 7 4- 27Using EasyEXPERTApplication TestApplication TestIn the application test mode, the EasyEXPERT main screen ha

4- 28 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTApplication TestOpen Definition of This Test... Opens the “Test Definition Window (page 6-3

Agilent B1500 User’s Guide, Edition 7 4- 29Using EasyEXPERTQuick TestQuick TestIn this mode, you can execute the test setups saved in a preset group (

4- 30 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTQuick TestDown Moves the selected test setup downward.• Set the • mark to the right cell

Agilent B1500 User’s Guide, Edition 7 4- 31Using EasyEXPERTRepeat Measurement SetupRepeat Measurement SetupThis dialog box is opened by clicking the R

Agilent B1500 User’s Guide, Edition 7ContentsIf there is one workspace . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4- 32 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTRepeat Measurement SetupStart Procedure Specifies the procedure executed before starting m

Agilent B1500 User’s Guide, Edition 7 4- 33Using EasyEXPERTOrganize Preset GroupOrganize Preset GroupThis dialog box is opened by selecting the Organi

4- 34 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTOrganize Preset GroupPreset Group Lists the preset setup saved in the preset group. The fol

Agilent B1500 User’s Guide, Edition 7 4- 35Using EasyEXPERTCalibrationCalibrationThe Calibration window is opened by clicking the Calibration button,

4- 36 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTCalibrationEnable Auto CalibrationEnables or disables the auto-calibration capability. If t

Agilent B1500 User’s Guide, Edition 7 4- 37Using EasyEXPERTCalibrationCMU CalibrationThe CMU calibration tab screen is used to perform the measurement

4- 38 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTCalibrationOpen Correction This check box is effective after the open correction data is me

Agilent B1500 User’s Guide, Edition 7 4- 39Using EasyEXPERTCalibrationAdvanced Options for CMU CalibrationThis dialog box is opened by clicking the Ad

4- 40 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTCalibrationIntegration Time This area defines the integration time used for measuring phase

Agilent B1500 User’s Guide, Edition 7 4- 41Using EasyEXPERTConfigurationConfigurationThe Configuration window is opened by clicking the Configuration

Contents Agilent B1500 User’s Guide, Edition 7Switching Matrix Operation Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4- 42 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTConfigurationStart Diagnosis Starts diagnostics for the selected items. To perform diagnost

Agilent B1500 User’s Guide, Edition 7 4- 43Using EasyEXPERTConfigurationASUThe ASU tab screen is available if the B1500A installs the HRSMU calibrated

4- 44 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTConfigurationPoll Confirms if the switching matrix with the specified GPIB Address is conne

Agilent B1500 User’s Guide, Edition 7 4- 45Using EasyEXPERTConfigurationExtended ConfigurationThis button opens the “Extended Configuration” on page 4

4- 46 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTConfigurationID Process ID of the eventProcess Process nameUser User name. Windows login na

Agilent B1500 User’s Guide, Edition 7 4- 47Using EasyEXPERTConfigurationCable Specifies the model number of the cable from the B2200A/ B2201A output

4- 48 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTSwitching Matrix Operation PanelSwitching Matrix Operation PanelThe Switching Matrix Operat

Agilent B1500 User’s Guide, Edition 7 4- 49Using EasyEXPERTSwitching Matrix Operation PanelApply Switch SetupThis button sends the switch setup to the

4- 50 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTStandby Channel DefinitionStandby Channel DefinitionThe Standby Channel Definition window i

Agilent B1500 User’s Guide, Edition 7 4- 51Using EasyEXPERTData DisplayData DisplayThe Data Display window is opened by clicking the Data Display butt

Agilent B1500 User’s Guide, Edition 7ContentsC-V Sweep . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4- 52 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTData DisplayNOTE About Display ModeThe Data Display window provides two display mode Overwr

Agilent B1500 User’s Guide, Edition 7 4- 53Using EasyEXPERTData DisplayData Display GUISetup Name This field just displays the name of the test setup

4- 54 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTData DisplayPrint Preview Opens the Print Preview dialog box used to specify Print Range/D

Agilent B1500 User’s Guide, Edition 7 4- 55Using EasyEXPERTData DisplayFigure 4-4 Print Preview ExampleEdit menu Provides the following functions.Copy

4- 56 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTData DisplayFigure 4-5 shows the graph copy and paste example. Click the X-Y Graph Plot are

Agilent B1500 User’s Guide, Edition 7 4- 57Using EasyEXPERTData DisplayView menu Provides the following functions.X-Y Graph Displays or hides the X-Y

4- 58 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTData Display1. Graph scale is optimized for the data on the selected layer (top layer).2. T

Agilent B1500 User’s Guide, Edition 7 4- 59Using EasyEXPERTData DisplayGradient... Opens the Gradient Value dialog box used to specify the gradient v

4- 60 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTData DisplayText menu Up to 20 texts can be added to a graph. The following functions are p

Agilent B1500 User’s Guide, Edition 7 4- 61Using EasyEXPERTData DisplayPointer menu Up to 30 pointers can be added to a graph. The following functions

Contents Agilent B1500 User’s Guide, Edition 7SPGU ALWG Setup Window . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

4- 62 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTData DisplayDisplay SetupThis setup screen is displayed by selecting View > Display Setu

Agilent B1500 User’s Guide, Edition 7 4- 63Using EasyEXPERTData DisplayGraph PropertiesThis dialog box is opened by clicking the Properties... button

4- 64 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTData DisplayList Display PropertiesThis dialog box is opened by clicking the Properties...

Agilent B1500 User’s Guide, Edition 7 4- 65Using EasyEXPERTData DisplayAuto Scale This icon will change the graph scale automatically to fit the trace

4- 66 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTData DisplayMarker Minimum This icon moves the marker to the minimum measurement point.Mark

Agilent B1500 User’s Guide, Edition 7 4- 67Using EasyEXPERTData DisplayData StatusIf measurement unit detects any status while measurement, the status

4- 68 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTData DisplayMiscellaneous OperationsThe following user interfaces provide several miscellan

Agilent B1500 User’s Guide, Edition 7 4- 69Using EasyEXPERTData DisplayKeyboardWhile the Data Display window is focused, the key operations shown in T

4- 70 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTData DisplayTable 4-3 Controlling X-Y GraphTable 4-4 Controlling MarkerKey DescriptionS Sho

Agilent B1500 User’s Guide, Edition 7 4- 71Using EasyEXPERTData DisplayTable 4-5 Controlling CursorTable 4-6 Controlling LineKey DescriptionC Shortcut

Agilent B1500 User’s Guide, Edition 7ContentsDefining Numeric/Vector Input Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-

4- 72 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTData DisplayTable 4-7 Mouse/Touch Panel Operations on Data Display WindowLocation Operation

Agilent B1500 User’s Guide, Edition 7 4- 73Using EasyEXPERTData DisplayX-Y Graph clicking the mouse wheelSame as clicking the rotary knob.This is effe

4- 74 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTPreviewPreviewThe Preview window and the Preview Settings dialog box are opened by selectin

Agilent B1500 User’s Guide, Edition 7 4- 75Using EasyEXPERTPreviewEdit menu Provides the following functions. See also Figure 4-5 and Figure 4-6.Copy

4- 76 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTPreviewPreview SettingsThe Preview Settings dialog box provides the following GUI.General D

Agilent B1500 User’s Guide, Edition 7 4- 77Using EasyEXPERTText File Export settingsText File Export settingsThis dialog box is opened by clicking Res

4- 78 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTText File Export settingsTable 4-9 Identification Section Record ItemsSetup data section Re

Agilent B1500 User’s Guide, Edition 7 4- 79Using EasyEXPERTText File Export settingsMeasurement data sectionRecord items of the measurement data. It m

4- 80 Agilent B1500 User’s Guide, Edition 7Using EasyEXPERTText File Export settingsTable 4-12 Setup Data Section Record Items (ON: checked, OFF: unch

5Classic Test Definition

Contents Agilent B1500 User’s Guide, Edition 7SPGU Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5- 2 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionThis chapter provides the reference information of the graphical user interface in th

Agilent B1500 User’s Guide, Edition 7 5- 3Classic Test DefinitionNOTE If You Use GNDU (Ground Unit)Keep to the following rule to use the ground unit.1

5- 4 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionI/V SweepI/V SweepOn the EasyEXPERT main screen, click the Classic Test tab and selec

Agilent B1500 User’s Guide, Edition 7 5- 5Classic Test DefinitionI/V SweepChannel SetupThis setup screen is used to define the channel setups and the

5- 6 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionI/V SweepMeasurement SetupThis setup screen is used to set the source channel outputs

Agilent B1500 User’s Guide, Edition 7 5- 7Classic Test DefinitionI/V SweepVAR2 This area defines the secondary sweep source output.Unit Source monito

5- 8 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionI/V SweepConstant This area defines the constant output source.Unit Source monitor u

Agilent B1500 User’s Guide, Edition 7 5- 9Classic Test DefinitionMulti Channel I/V SweepMulti Channel I/V SweepOn the EasyEXPERT main screen, click th

5- 10 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionMulti Channel I/V SweepChannel SetupThis setup screen is used to define the channel

Agilent B1500 User’s Guide, Edition 7 5- 11Classic Test DefinitionMulti Channel I/V SweepMeasurement SetupThis setup screen is used to set the source

Agilent B1500 User’s Guide, Edition 7ContentsSMU Measurement Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5- 12 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionMulti Channel I/V SweepVAR2 This area defines the secondary sweep source output.Unit

Agilent B1500 User’s Guide, Edition 7 5- 13Classic Test DefinitionI/V List SweepI/V List SweepOn the EasyEXPERT main screen, click the Classic Test ta

5- 14 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionI/V List SweepChannel SetupThis setup screen is used to define the channel setups an

Agilent B1500 User’s Guide, Edition 7 5- 15Classic Test DefinitionI/V List SweepMiscellaneous VariablesThis area defines the variables for the time st

5- 16 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionI/V List SweepVAR2 This area defines the secondary sweep source output.Unit Source

Agilent B1500 User’s Guide, Edition 7 5- 17Classic Test DefinitionI/V List SweepConstant This area defines the constant output source.Unit Source mon

5- 18 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionI/V List SweepDefine vector dataThis dialog box is opened by clicking the grid butto

Agilent B1500 User’s Guide, Edition 7 5- 19Classic Test DefinitionI/V List SweepThe Define vector data dialog box provides the following GUI.OK button

5- 20 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionI/V List SweepTo import vector dataThe Define vector data dialog box can import comm

Agilent B1500 User’s Guide, Edition 7 5- 21Classic Test DefinitionI/V-t SamplingI/V-t SamplingOn the EasyEXPERT main screen, click the Classic Test ta

Contents Agilent B1500 User’s Guide, Edition 7External GPIB Devices are not Detected. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5- 22 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionI/V-t SamplingChannel SetupThis setup screen is used to define the channel setups an

Agilent B1500 User’s Guide, Edition 7 5- 23Classic Test DefinitionI/V-t SamplingMeasurement SetupThis setup screen is used to set the sampling timing

5- 24 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionI/V-t SamplingBase Hold Time Hold time of the Base value output until the Source va

Agilent B1500 User’s Guide, Edition 7 5- 25Classic Test DefinitionI/V-t SamplingBase value is available for all output channels for the SIMULTANEOUS m

5- 26 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionC-V SweepC-V SweepOn the EasyEXPERT main screen, click the Classic Test tab and sele

Agilent B1500 User’s Guide, Edition 7 5- 27Classic Test DefinitionC-V SweepChannel SetupThis setup screen is used to define the channel setups and the

5- 28 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionC-V SweepMeasurement SetupThis setup screen is used to set the MFCMU measurement mod

Agilent B1500 User’s Guide, Edition 7 5- 29Classic Test DefinitionC-V SweepUp Moves the selected frequency upward.Down Moves the selected frequency

5- 30 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionDirect ControlDirect ControlOn the EasyEXPERT main screen, click the Classic Test ta

Agilent B1500 User’s Guide, Edition 7 5- 31Classic Test DefinitionDirect ControlChannel SetupThis setup screen is used to define the channel setups an

DECLARATION OF CONFORMITY According to ISO/IEC Guide 22 and CEN/CENELEC EN 45014Manufacturer’s Name: Agilent Technologies International sarl Manufactu

Agilent B1500 User’s Guide, Edition 7ContentsError Codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

5- 32 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionDirect ControlTable 5-1 Available Type Values for Measurement Data VariablesType Des

Agilent B1500 User’s Guide, Edition 7 5- 33Classic Test DefinitionDirect ControlMeasurement SetupThis setup screen is used to define GPIB commands for

5- 34 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionDirect ControlAdvanced SetupThis window is opened by clicking the Advanced button on

Agilent B1500 User’s Guide, Edition 7 5- 35Classic Test DefinitionDirect ControlCH1 represents channel 1 on the first selector and CH3 represents chan

5- 36 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionDirect ControlCommand SetupTo define the Command Setup, set a command or a function

Agilent B1500 User’s Guide, Edition 7 5- 37Classic Test DefinitionDirect ControlReadDataBufferThis function reads the measurement data. The number of

5- 38 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionDirect ControlcompenReZThis built-in function performs compensation on the specified

Agilent B1500 User’s Guide, Edition 7 5- 39Classic Test DefinitionDirect ControlcompenImZThis built-in function performs compensation on the specified

5- 40 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionDirect ControlcompenReYThis built-in function performs compensation on the specified

Agilent B1500 User’s Guide, Edition 7 5- 41Classic Test DefinitionDirect ControlcompenImYThis built-in function performs compensation on the specified

Contents Agilent B1500 User’s Guide, Edition 7To Move the EasyEXPERT Database . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10

5- 42 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionFunction SetupFunction SetupThis setup screen is displayed by clicking the Function

Agilent B1500 User’s Guide, Edition 7 5- 43Classic Test DefinitionAuto Analysis SetupAuto Analysis SetupThis setup screen is displayed by clicking the

5- 44 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionAuto Analysis Setup• “Regression line”: For drawing a regression line by using the m

Agilent B1500 User’s Guide, Edition 7 5- 45Classic Test DefinitionAuto Analysis SetupTangent line The First Point area is used to specify the measure

5- 46 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionDisplay SetupDisplay SetupThis setup screen is displayed by clicking the Display Set

Agilent B1500 User’s Guide, Edition 7 5- 47Classic Test DefinitionDisplay SetupUp Moves the selected parameter upward.Down Moves the selected parame

5- 48 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionSMU Range Setup WindowSMU Range Setup WindowThis window is opened by clicking the Ra

Agilent B1500 User’s Guide, Edition 7 5- 49Classic Test DefinitionSMU Range Setup WindowNOTE To use 1 pA rangeThe measurement channel connected to the

5- 50 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionADC and Integration Time Setup WindowADC and Integration Time Setup WindowThis windo

Agilent B1500 User’s Guide, Edition 7 5- 51Classic Test DefinitionAdvanced Setup WindowAdvanced Setup WindowThis window is opened by clicking the Adva

Agilent B1500 User’s Guide, Edition 7Contents

5- 52 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionAdvanced Setup WindowSemiconductor Relays (16440A SMU/PG Selector)This area sets the

Agilent B1500 User’s Guide, Edition 7 5- 53Classic Test DefinitionCMU Range Setup WindowCMU Range Setup WindowThis window is opened by clicking the Ra

5- 54 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionAdvanced Setup Window for C-V SweepAdvanced Setup Window for C-V SweepThis window is

Agilent B1500 User’s Guide, Edition 7 5- 55Classic Test DefinitionSwitching Matrix ControlSwitching Matrix ControlOn the EasyEXPERT main screen, click

5- 56 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionSwitching Matrix ControlOutputs Switching matrix output channel number or labelFour

Agilent B1500 User’s Guide, Edition 7 5- 57Classic Test DefinitionSPGU ControlSPGU ControlOn the EasyEXPERT main screen, click the Classic Test tab an

5- 58 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionSPGU ControlProgress Monitor Provides the following check boxes used to set the Data

Agilent B1500 User’s Guide, Edition 7 5- 59Classic Test DefinitionSPGU Pulse Setup WindowSPGU Pulse Setup WindowThis window is opened by clicking the

5- 60 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionSPGU Pulse Setup WindowSPGU setup view orderUp Moves the selected channel setup upw

Agilent B1500 User’s Guide, Edition 7 5- 61Classic Test DefinitionLoad Z Setup WindowLoad Z Setup WindowThis window is opened by clicking the Load Z b

1 Getting Started

5- 62 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionPulse Switch Setup WindowPulse Switch Setup WindowThis window is opened by clicking

Agilent B1500 User’s Guide, Edition 7 5- 63Classic Test DefinitionSPGU ALWG Setup WindowSPGU ALWG Setup WindowThis window is opened by clicking the Pu

5- 64 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionDefine ALWG Waveform WindowDefine ALWG Waveform WindowThis window is opened by click

Agilent B1500 User’s Guide, Edition 7 5- 65Classic Test DefinitionDefine ALWG Waveform WindowDelete Deletes the column data highlighted in the Sequen

5- 66 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionDefine ALWG Waveform WindowThe Repeat Count field provides the following functions i

Agilent B1500 User’s Guide, Edition 7 5- 67Classic Test DefinitionDefine ALWG Waveform WindowWaveform Pattern EditorThis window is opened by several a

5- 68 Agilent B1500 User’s Guide, Edition 7Classic Test DefinitionDefine ALWG Waveform WindowPattern Editor Defines the pattern data. The Pattern Edit

6 Application Test Definition

6- 2 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionThis chapter provides the reference information of the Test Definition window use

Agilent B1500 User’s Guide, Edition 7 6- 3Application Test DefinitionTest Definition WindowTest Definition WindowThe Test Definition window is opened

1-2 Agilent B1500 User’s Guide, Edition 7Getting StartedThis chapter describes the basic operations of Agilent B1500A. Before learning the product det

6- 4 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionTest Definition WindowThe Test Definition window provides the following menus.Fil

Agilent B1500 User’s Guide, Edition 7 6- 5Application Test DefinitionTest SpecificationTest SpecificationThis setup screen is used to define the test

6- 6 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionTest SpecificationTest Parameters DefinitionThe test parameters are defined in th

Agilent B1500 User’s Guide, Edition 7 6- 7Application Test DefinitionTest SpecificationAdd Adds a row for the test parameter.Delete Deletes the sele

6- 8 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionTest SpecificationDimension... For Vector parameters.Opens the Define dimensions

Agilent B1500 User’s Guide, Edition 7 6- 9Application Test DefinitionTest SpecificationSymbols... For Numeric or Vector parameters.Opens the Define d

6- 10 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionTest SpecificationDefine LayoutThis dialog box is opened by clicking the Layout.

Agilent B1500 User’s Guide, Edition 7 6- 11Application Test DefinitionTest SpecificationThe Define Layout dialog box provides the following menus.File

6- 12 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionTest SpecificationTab Order menu Top to Bottom Sets the TabIndex in ascending o

Agilent B1500 User’s Guide, Edition 7 6- 13Application Test DefinitionTest SpecificationTo Select Entry FieldsThe following methods are available for

Agilent B1500 User’s Guide, Edition 7 1-3Getting StartedTo Turn On/Off B1500ATo Turn On/Off B1500ANOTE When turning the B1500A onOpen the measurement

6- 14 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionTest OutputTest OutputThis setup screen is used to set the test result output (t

Agilent B1500 User’s Guide, Edition 7 6- 15Application Test DefinitionTest OutputAnalysis Parameter DefinitionThis window is opened by clicking the De

6- 16 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionTest ContentsTest ContentsTest contents are the core of the test definition, and

Agilent B1500 User’s Guide, Edition 7 6- 17Application Test DefinitionTest ContentsDefining/Editing Test ContentsThe Test Contents setup screen is use

6- 18 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionTest ContentsProgram ComponentThis component selection menu lists the program co

Agilent B1500 User’s Guide, Edition 7 6- 19Application Test DefinitionTest ContentsMiscellaneous This component selection menu lists the miscellaneous

6- 20 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionTest ContentsInsert This button puts the selected component on the next line of

Agilent B1500 User’s Guide, Edition 7 6- 21Application Test DefinitionTest ContentsDebugging Test ContentsOn the Test Contents tab screen, click the D

6- 22 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionTest ContentsVariable InspectorThis Variable Inspector is displayed by clicking

Agilent B1500 User’s Guide, Edition 7 6- 23Application Test DefinitionTest ContentsExternal Variable SetupThis dialog box is displayed by clicking the

1-4 Agilent B1500 User’s Guide, Edition 7Getting StartedTo Turn On/Off B1500ATo Turn B1500A On1. Connect the power cable from Agilent B1500A to an AC

6- 24 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionLocal Variable DefinitionLocal Variable DefinitionThis setup editor is displayed

Agilent B1500 User’s Guide, Edition 7 6- 25Application Test DefinitionLocal Variable DefinitionVector Variable This area provides the following entry

6- 26 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionProgram ComponentProgram ComponentThe Program Component selection menu provides

Agilent B1500 User’s Guide, Edition 7 6- 27Application Test DefinitionAuto AnalysisAuto AnalysisThis component provides the setup editor used to set u

6- 28 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionAuto AnalysisMarker This area sets the marker automatically displayed and moved

Agilent B1500 User’s Guide, Edition 7 6- 29Application Test DefinitionAuto AnalysisTangent line The First Point area is used to specify the measureme

6- 30 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionData Display ControlData Display ControlThis component enables or disables the t

Agilent B1500 User’s Guide, Edition 7 6- 31Application Test DefinitionDisplay Data SetupDisplay Data SetupThis component is used to set the data outpu

6- 32 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionDisplay Data SetupList Display, ParametersThe List Display area sets the output

Agilent B1500 User’s Guide, Edition 7 6- 33Application Test DefinitionGPIB I/OGPIB I/OThis component provides the setup editor that contains the follo

Agilent B1500 User’s Guide, Edition 7 1-5Getting StartedTo Turn On/Off B1500ANOTE Agilent B1500A has the following front panel user interface.•StopSto

6- 34 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionGPIB I/ORead String Reads a string value from the specified GPIB device.Address

Agilent B1500 User’s Guide, Edition 7 6- 35Application Test DefinitionGPIB I/ORead List Reads a vector data from the specified GPIB device.Address GP

6- 36 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionGPIB I/O• Go To LocalReturns the specified GPIB device to the local state.Addres

Agilent B1500 User’s Guide, Edition 7 6- 37Application Test DefinitionGPIB I/OExample 2 After performing Example 1, enter the following query command

6- 38 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionMessageMessageThis component provides the setup editor that contains the followi

Agilent B1500 User’s Guide, Edition 7 6- 39Application Test DefinitionData Store ControlData Store ControlThis component enables or disables the test

6- 40 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionCommand ExecutionCommand ExecutionThis component provides the setup editor that

Agilent B1500 User’s Guide, Edition 7 6- 41Application Test DefinitionCommand ExecutionRead Type Type of data to read. String (string data), Value (nu

6- 42 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionUsing Command ExecutionUsing Command ExecutionWindows execution file (.exe file)

Agilent B1500 User’s Guide, Edition 7 6- 43Application Test DefinitionUsing Command ExecutionNOTE string built-in functionThe string built-in function

1-6 Agilent B1500 User’s Guide, Edition 7Getting StartedTo Launch EasyEXPERTTo Launch EasyEXPERT1. Click the Start EasyEXPERT button, and wait until t

6- 44 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionUsing Command ExecutionDefining Numeric Output Parameter1. Define a numeric vari

Agilent B1500 User’s Guide, Edition 7 6- 45Application Test DefinitionUsing Command ExecutionDefining Format FieldThe Format field requires a keyword

6- 46 Agilent B1500 User’s Guide, Edition 7Application Test DefinitionUsing Command ExecutionSetup ExampleThe following example setup is used to execu

7 Function Details

7- 2 Agilent B1500 User’s Guide, Edition 7Function DetailsThis chapter explains the following measurement functions of Agilent B1500A/EasyEXPERT, and

Agilent B1500 User’s Guide, Edition 7 7- 3Function DetailsI/V Sweep MeasurementI/V Sweep MeasurementFor the I/V sweep measurements, sweep source chann

7- 4 Agilent B1500 User’s Guide, Edition 7Function DetailsI/V Sweep MeasurementOutput RangeOutput range of the sweep source channel is automatically s

Agilent B1500 User’s Guide, Edition 7 7- 5Function DetailsI/V Sweep MeasurementThe following setup is required to perform the basic sweep measurements

7- 6 Agilent B1500 User’s Guide, Edition 7Function DetailsI/V Sweep MeasurementFigure 7-3 Basic Sweep Measurement Subordinate Sweep Measurement For su

Agilent B1500 User’s Guide, Edition 7 7- 7Function DetailsI/V Sweep Measurement2. Set the VAR1 channel as shown in “Basic Sweep Measurement”.3. Specif

Agilent B1500 User’s Guide, Edition 7 1-7Getting StartedTo Launch EasyEXPERTIf Only One Workspace ExistsFor the screen as shown in Figure 1-1, perform

7- 8 Agilent B1500 User’s Guide, Edition 7Function DetailsI/V Sweep MeasurementSynchronous Sweep Measurement For synchronous sweep measurement, you se

Agilent B1500 User’s Guide, Edition 7 7- 9Function DetailsI/V Sweep MeasurementFigure 7-5 Synchronous Sweep Measurement Pulsed Sweep Measurement For a

7- 10 Agilent B1500 User’s Guide, Edition 7Function DetailsI/V Sweep MeasurementPeriod SMU forces the next pulse after specified pulse period. 5 ms t

Agilent B1500 User’s Guide, Edition 7 7- 11Function DetailsI/V Sweep MeasurementFigure 7-6 Pulse Source and Other Sources Figure 7-7 SMU Pulse

7- 12 Agilent B1500 User’s Guide, Edition 7Function DetailsMulti Channel I/V Sweep MeasurementMulti Channel I/V Sweep MeasurementMulti Channel I/V Swe

Agilent B1500 User’s Guide, Edition 7 7- 13Function DetailsI/V-t Sampling MeasurementI/V-t Sampling MeasurementFor the I/V-t sampling measurements, so

7- 14 Agilent B1500 User’s Guide, Edition 7Function DetailsI/V-t Sampling Measurement1. When the Output Sequence is SEQUENTIAL, source channels start

Agilent B1500 User’s Guide, Edition 7 7- 15Function DetailsI/V-t Sampling MeasurementSetup ParametersThe following setup is required to perform the I/

7- 16 Agilent B1500 User’s Guide, Edition 7Function DetailsI/V-t Sampling MeasurementInterval ≥ 0.0001 + 0.00002 × (number of measurement channels-1)N

Agilent B1500 User’s Guide, Edition 7 7- 17Function DetailsI/V-t Sampling MeasurementTime Data and IndexTo obtain the time data, enter a variable name

• HerstellerbescheinigungGEÄUSCHEMISSIONLpa < 70 dBam Arbeitsplatznormaler Betriebnach DIN 45635 T. 19• Manufacturer’s DeclarationACOUSTIC NOISE EM

1-8 Agilent B1500 User’s Guide, Edition 7Getting StartedTo Launch EasyEXPERTTo Create WorkspaceFor the screen as shown in Figure 1-2, perform the foll

7- 18 Agilent B1500 User’s Guide, Edition 7Function DetailsI/V-t Sampling MeasurementSource Output Sequence and Time OriginWhen the Output Sequence is

Agilent B1500 User’s Guide, Edition 7 7- 19Function DetailsC-V Sweep MeasurementC-V Sweep MeasurementFor the C-V sweep measurements, the multi frequen

7- 20 Agilent B1500 User’s Guide, Edition 7Function DetailsC-V Sweep MeasurementFrequency List AC signal frequency. 1 kHz to 5 MHz. Resolution: 6 dig

Agilent B1500 User’s Guide, Edition 7 7- 21Function DetailsC-V Sweep MeasurementMeasurement ParametersMFCMU performs impedance measurement, calculates

7- 22 Agilent B1500 User’s Guide, Edition 7Function DetailsC-V Sweep MeasurementFigure 7-11 Impedance and Parameter CalculationIn the GPIB remote mode

Agilent B1500 User’s Guide, Edition 7 7- 23Function DetailsC-V Sweep MeasurementFour-Terminal Pair ConfigurationGenerally, any mutual inductance, inte

7- 24 Agilent B1500 User’s Guide, Edition 7Function DetailsC-V Sweep MeasurementTo realize accurate measurements using the four-terminal pair measurem

Agilent B1500 User’s Guide, Edition 7 7- 25Function DetailsC-V Sweep MeasurementThe MFCMU will internally perform the error correction for the CMU cab

7- 26 Agilent B1500 User’s Guide, Edition 7Function DetailsSPGU ModuleSPGU ModuleHigh voltage SPGU is a pulse generator module designed for semiconduc

Agilent B1500 User’s Guide, Edition 7 7- 27Function DetailsSPGU ModulePG Operation ModeIn the PG mode (pulse generator operation mode), the SPGU outpu

Agilent B1500 User’s Guide, Edition 7 1-9Getting StartedTo Launch EasyEXPERTTo Select WorkspaceFor the screen as shown in Figure 1-3, perform the foll

7- 28 Agilent B1500 User’s Guide, Edition 7Function DetailsSPGU ModuleSPGU Pulse Setup ParametersThe following setup is required to apply the SPGU pul

Agilent B1500 User’s Guide, Edition 7 7- 29Function DetailsSPGU Module3. (Optional) Set the Additional Pulse fields for the 3-Level Pulse. 3-level pul

7- 30 Agilent B1500 User’s Guide, Edition 7Function DetailsSPGU ModulePulse Output Operation SummaryThe SPGU can be used for I/V Sweep, Multi Channel

Agilent B1500 User’s Guide, Edition 7 7- 31Function DetailsSPGU ModuleTable 7-3 Output Timing for I/V-t Sampling, SimultaneousPulse output conditionsS

7- 32 Agilent B1500 User’s Guide, Edition 7Function DetailsSPGU ModuleTable 7-4 Output Timing for I/V-t Sampling, SequentialPulse output conditionsSou

Agilent B1500 User’s Guide, Edition 7 7- 33Function DetailsSPGU ModuleTable 7-5 Output Timing for I/V Sweep, Multi Channel I/V Sweep, I/V List SweepPu

7- 34 Agilent B1500 User’s Guide, Edition 7Function DetailsSPGU ModuleALWG Operation ModeIn the ALWG mode (arbitrary linear waveform generator operati

Agilent B1500 User’s Guide, Edition 7 7- 35Function DetailsSPGU ModuleIn the example in Figure 7-19, SPGU1 and SPGU2 are used. The channels output Pat

7- 36 Agilent B1500 User’s Guide, Edition 7Function DetailsSweep Abort FunctionSweep Abort FunctionThe automatic sweep abort function is used to stop

Agilent B1500 User’s Guide, Edition 7 7- 37Function DetailsStandby FunctionStandby FunctionThis function forces the specified DC bias outputs (standby

1-10 Agilent B1500 User’s Guide, Edition 7Getting StartedTo Use Application Test ModeTo Use Application Test ModeFor the screen as shown in Figure 1-4

7- 38 Agilent B1500 User’s Guide, Edition 7Function DetailsStandby FunctionOutput Sequence of Standby ChannelsThe standby channels will start to outpu

Agilent B1500 User’s Guide, Edition 7 7- 39Function DetailsStandby FunctionTo Use Standby FunctionTo start the standby output, click the Standby ON bu

7- 40 Agilent B1500 User’s Guide, Edition 7Function DetailsBias Hold FunctionBias Hold FunctionThis function is used to keep source output after measu

Agilent B1500 User’s Guide, Edition 7 7- 41Function DetailsBias Hold FunctionSetup method This function can be set by using the Advanced Setup window.

7- 42 Agilent B1500 User’s Guide, Edition 7Function DetailsCurrent Offset CancelCurrent Offset CancelThis function subtracts the offset current from t

Agilent B1500 User’s Guide, Edition 7 7- 43Function DetailsCurrent Offset CancelTable 7-7 Measurement range, allowable offset value, and module typeIf

7- 44 Agilent B1500 User’s Guide, Edition 7Function DetailsSMU CMU Unify UnitSMU CMU Unify UnitThe SMU CMU Unify Unit (SCUU) is available for Agilent

Agilent B1500 User’s Guide, Edition 7 7- 45Function DetailsSMU CMU Unify UnitFigure 7-21 SCUU Input/Output ConnectionsNOTE Before using SCUUInstrument

7- 46 Agilent B1500 User’s Guide, Edition 7Function DetailsAtto Sense and Switch UnitAtto Sense and Switch UnitThe Atto Sense and Switch Unit (ASU) ca

Agilent B1500 User’s Guide, Edition 7 7- 47Function DetailsAtto Sense and Switch UnitThe ASU has output connectors, two triaxial, that must be connect

Agilent B1500 User’s Guide, Edition 7 1-11Getting StartedTo Use Application Test ModeTo enter the value, use the USB keyboard or the screen/numeric ke

7- 48 Agilent B1500 User’s Guide, Edition 7Function DetailsSMU/PG SelectorSMU/PG SelectorAgilent 16440A SMU/PG Selector provides the built-in switchin

Agilent B1500 User’s Guide, Edition 7 7- 49Function DetailsSMU Ranging ModeSMU Ranging ModeAgilent B1500 provides the following operation modes for th

7- 50 Agilent B1500 User’s Guide, Edition 7Function DetailsSMU Ranging ModeAuto Ranging Range changing is performed as below.For measurement channelsT

Agilent B1500 User’s Guide, Edition 7 7- 51Function DetailsSMU Ranging ModeLimited Auto RangingLimited auto ranging is similar to auto ranging. Howeve

7- 52 Agilent B1500 User’s Guide, Edition 7Function DetailsSMU Ranging ModeEnhanced Auto Ranging for Current MeasurementExpanded functions are availab

Agilent B1500 User’s Guide, Edition 7 7- 53Function DetailsSMU ComplianceSMU Compliance Compliance is the output limiter to prevent damage to the test

7- 54 Agilent B1500 User’s Guide, Edition 7Function DetailsSMU CompliancePower Compliance In addition to V compliance or I compliance, you can set pow

Agilent B1500 User’s Guide, Edition 7 7- 55Function DetailsSMU ComplianceSMU output values If you specify power compliance, the SMU changes the curren

7- 56 Agilent B1500 User’s Guide, Edition 7Function DetailsSMU PulseSMU PulseThe source/monitor unit (SMU) can apply voltage or current pulse. The pul

Agilent B1500 User’s Guide, Edition 7 7- 57Function DetailsSMU Measurement TimeSMU Measurement Time Measurement time depends on integration time, meas

1-12 Agilent B1500 User’s Guide, Edition 7Getting StartedTo Use Classic Test ModeTo Use Classic Test ModeThe following procedure performs the I/V Swee

7- 58 Agilent B1500 User’s Guide, Edition 7Function DetailsSMU Measurement TimeTable 7-8 Integration Time and Number of SamplesADC Mode DescriptionHig

Agilent B1500 User’s Guide, Edition 7 7- 59Function DetailsSMU Measurement TimeOverhead TimeThe overhead time is the time required for range changing

7- 60 Agilent B1500 User’s Guide, Edition 7Function DetailsSMU Measurement TimeWait TimeWait time is the time after starting source output until chang

Agilent B1500 User’s Guide, Edition 7 7- 61Function DetailsSMU Measurement TimeMultiple Measurement ChannelsTo use multiple measurement channels, defi

7- 62 Agilent B1500 User’s Guide, Edition 7Function DetailsSMU FilterSMU Filter The filter is mounted on each source/monitor unit (SMU) module. It ass

Agilent B1500 User’s Guide, Edition 7 7- 63Function DetailsSMU Series ResistorSMU Series ResistorThe series resistor (approx. 1 MΩ) is mounted on each

7- 64 Agilent B1500 User’s Guide, Edition 7Function DetailsInterlock FunctionInterlock FunctionThe interlock function is designed to prevent electrica

Agilent B1500 User’s Guide, Edition 7 7- 65Function DetailsAuto Power Off FunctionAuto Power Off FunctionIf an abnormal voltage or current is detected

7- 66 Agilent B1500 User’s Guide, Edition 7Function DetailsInitial SettingsInitial Settings Agilent B1500 is initialized by turning the B1500 on, the

Agilent B1500 User’s Guide, Edition 7 7- 67Function DetailsInitial SettingsCMU SCUU path/indicator open/enableMeasurement parameter Cp-GMeasurement ra

Agilent B1500 User’s Guide, Edition 7 1-13Getting StartedTo Use Classic Test ModeSee “To Perform Measurement” on page 1-14 to start measurement.Table

7- 68 Agilent B1500 User’s Guide, Edition 7Function DetailsInitial Settings

8 Built-in Programming Tool

8- 2 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolThis chapter explains the programming tool built into Agilent B1500A/EasyEXPERT. Th

Agilent B1500 User’s Guide, Edition 7 8- 3Built-in Programming ToolVariables and ExpressionsVariables and ExpressionsVariables can be used in Agilent

8- 4 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolVariables and ExpressionsExpressionsFigure 8-1 shows the expression effective for v

Agilent B1500 User’s Guide, Edition 7 8- 5Built-in Programming ToolVariables and ExpressionsLiteralsNumeric type and string type are available.• Numer

8- 6 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolVariables and ExpressionsTable 8-1 Monomial Operator and Binomial OperatorBuilt-in

Agilent B1500 User’s Guide, Edition 7 8- 7Built-in Programming ToolBuilt-in FunctionsBuilt-in FunctionsThis section describes Agilent EasyEXPERT built

8- 8 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolBuilt-in Functionsatan(A) Returns the arctangent value of the expression A.Example

Agilent B1500 User’s Guide, Edition 7 8- 9Built-in Programming ToolBuilt-in Functionsdelta(A) Returns the difference of the expression A. Calculation

1-14 Agilent B1500 User’s Guide, Edition 7Getting StartedTo Perform MeasurementTo Perform Measurement1. Click the Single button (upper right on the ma

8- 10 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolBuilt-in Functionsdim1Size(A) Returns the number of elements in the primary plane

Agilent B1500 User’s Guide, Edition 7 8- 11Built-in Programming ToolBuilt-in Functionsinteg(A,B) Performs numerical integration of the expression A by

8- 12 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolBuilt-in Functionslog(A) Returns the logarithm (base e) of the expression A.If A=

Agilent B1500 User’s Guide, Edition 7 8- 13Built-in Programming ToolBuilt-in Functionsmax(A) Returns the maximum value of data in the expression A. F

8- 14 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolBuilt-in Functionsstring(A) Translates the expression A to a string data, and retu

Agilent B1500 User’s Guide, Edition 7 8- 15Built-in Programming ToolRead Out FunctionsRead Out FunctionsThe read out functions are built-in functions

8- 16 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolRead Out Functions@CYn Returns the value of the Yn coordinate at the active curso

Agilent B1500 User’s Guide, Edition 7 8- 17Built-in Programming ToolRead Out Functions• If the X axis is linear scale, and the Yn axis is log scale:α

8- 18 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolRead Out Functions@IY Returns the value of the Y coordinate at the intersection o

Agilent B1500 User’s Guide, Edition 7 8- 19Built-in Programming ToolScript Program StatementsScript Program StatementsThe program statements are used

Agilent B1500 User’s Guide, Edition 7 1-15Getting StartedTo Perform MeasurementTo Use Test Result EditorThe Test Result Editor provides the following

8- 20 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolScript Program StatementsCOMMENT This statement enters a comment in the program li

Agilent B1500 User’s Guide, Edition 7 8- 21Built-in Programming ToolScript Program StatementsLOOP Beginning of the LOOP/END LOOP block. LOOP and END L

8- 22 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolScript Program StatementsExample 2 Test definition name: NandFlash IV-Write-IVLoca

Agilent B1500 User’s Guide, Edition 7 8- 23Built-in Programming ToolScript Program Statements(continues from the previous page) VthInitial = getNumer

8- 24 Agilent B1500 User’s Guide, Edition 7Built-in Programming ToolScript Program Statements

9 If You Have a Problem

9-2 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemThis chapter explains how to solve problems or how to read error codes, if you encounte

Agilent B1500 User’s Guide, Edition 7 9-3If You Have a ProblemWhen You Operate B1500AWhen You Operate B1500AThis section covers the following basic pr

9-4 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemWhen You Operate B1500AASU is not DetectedIf Agilent B1500A/EasyEXPERT cannot detect AS

Agilent B1500 User’s Guide, Edition 7 9-5If You Have a ProblemWhen You Operate B1500ATo Simplify the ConnectionsIf you want to simplify the measuremen

1-16 Agilent B1500 User’s Guide, Edition 7Getting StartedTo Use Analysis ToolsTo Use Analysis ToolsThe Data Display window provides several analysis f

9-6 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemWhen You Perform MeasurementWhen You Perform MeasurementThis section covers the followi

Agilent B1500 User’s Guide, Edition 7 9-7If You Have a ProblemWhen You Perform MeasurementNoise Affects the Measured ValuesWhen you measure low curren

9-8 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemWhen You Perform MeasurementVoltage Measurement Error is LargeVoltage measurement error

Agilent B1500 User’s Guide, Edition 7 9-9If You Have a ProblemWhen You Perform MeasurementSMU Oscillates for Negative Resistance MeasurementsIf the DU

9-10 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemWhen You Perform MeasurementLarge Current Causes High Temperature (Thermal Drift)If a

Agilent B1500 User’s Guide, Edition 7 9-11If You Have a ProblemWhen You Perform MeasurementUnexpected Sampling Measurement Data is ReturnedIf sampling

9-12 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemBefore Shipping to Service CenterBefore Shipping to Service CenterBefore shipping Agil

Agilent B1500 User’s Guide, Edition 7 9-13If You Have a ProblemBefore Shipping to Service CenterTo Collect Equipment and AccessoriesThe following equi

9-14 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemData Backup and RecoveryData Backup and RecoveryUnexpected trouble of HDD (hard disk d

Agilent B1500 User’s Guide, Edition 7 9-15If You Have a ProblemData Backup and RecoveryFolders to BackupBackup should be made for the following data a

2 Introduction

9-16 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemData Backup and RecoveryTo Restore Database BackupEasyEXPERT database can be restored

Agilent B1500 User’s Guide, Edition 7 9-17If You Have a ProblemData Backup and RecoveryTo Make Backup of Other DataThere are the following three ways

9-18 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemData Backup and RecoveryTo Restore Backup of Other DataBackups can be restored as show

Agilent B1500 User’s Guide, Edition 7 9-19If You Have a ProblemB1500A System RecoveryB1500A System RecoveryIf you find problems in the B1500A system,

9-20 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemB1500A System RecoveryFigure 9-1 Agilent System Recovery ScreenAgilent Technologies Sy

Agilent B1500 User’s Guide, Edition 7 9-21If You Have a ProblemB1500A System RecoveryTo Restore DatabaseEasyEXPERT database can be restored by the fol

9-22 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemUpdating EasyEXPERTUpdating EasyEXPERTNOTE The latest version of the EasyEXPERT update

Agilent B1500 User’s Guide, Edition 7 9-23If You Have a ProblemError CodesError CodesThis section lists Agilent B1500 error codes and messages.• “Agil

9-24 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes104001 Module (A) is not available.105001 Generic setup error occurred. C

Agilent B1500 User’s Guide, Edition 7 9-25If You Have a ProblemError Codes105031 The product of voltage source value and current compliance value of

Safety SummaryThe following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failur

2- 2 Agilent B1500 User’s Guide, Edition 7IntroductionThis chapter describes the basic functions and features of Agilent B1500A Semiconductor Device A

9-26 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes105049 The coefficient for High Speed ADC A averaging mode must be between

Agilent B1500 User’s Guide, Edition 7 9-27If You Have a ProblemError Codes105073 Hold time for I/V-t sampling must be between A s and B s.105074 Mul

9-28 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes105804 Bias hold function execution error. Output voltage or voltage compl

Agilent B1500 User’s Guide, Edition 7 9-29If You Have a ProblemError Codes105841 Sum of Delay, Width, and Trailing × 1.25 must be within Period value

9-30 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes105912 Test execution error was detected. Check the parameter values of th

Agilent B1500 User’s Guide, Edition 7 9-31If You Have a ProblemError Codes108006 Function Module is inaccessible because it has been removed. Restart

9-32 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes109022 The value of standard for CMU short correction must be finite as im

Agilent B1500 User’s Guide, Edition 7 9-33If You Have a ProblemError Codes111016 ALWaveform type expression must be entered. Expression: A111021 Tes

9-34 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes112010 All SPGU channels must be set to the same output mode, VPULSE or AL

Agilent B1500 User’s Guide, Edition 7 9-35If You Have a ProblemError Codes112072 Invalid value A was specified for Enable/Disable of I/V-t Sampling S

Agilent B1500 User’s Guide, Edition 7 2- 3IntroductionOverviewOverviewAgilent B1500A Semiconductor Device Analyzer is the new generation one box solut

9-36 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes113023 Value for string parameter is not contained in the enumeration. Val

Agilent B1500 User’s Guide, Edition 7 9-37If You Have a ProblemError Codes114104 Folder creation failed during automatic data export. Specify the cor

9-38 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes117001 Enter another label for the switching matrix input port. A is alrea

Agilent B1500 User’s Guide, Edition 7 9-39If You Have a ProblemError Codes120003 Script program execution ended abnormally. Program execution stopped

9-40 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes122004 Invalid expression is specified for function argument. Function: A,

Agilent B1500 User’s Guide, Edition 7 9-41If You Have a ProblemError Codes130001 Transport function error occurred.130002 A target package was not f

9-42 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes133006 The specified GPIB address value is invalid. Set the correct GPIB a

Agilent B1500 User’s Guide, Edition 7 9-43If You Have a ProblemError Codes140005 Invalid operation for the stream occurred. Internal error.140006 Du

9-44 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes170001 Archive process failed. Reason: A171001 Data compression failed. P

Agilent B1500 User’s Guide, Edition 7 9-45If You Have a ProblemError Codes300021 SDA daemon failed to start SDA service. path: A, arguments: B, reaso

2- 4 Agilent B1500 User’s Guide, Edition 7IntroductionOverview• Agilent B1500A Semiconductor Device AnalyzerMainframe that provides the ground unit (G

9-46 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes300109 EasyEXPERT database backup extraction error. See the log file C:\Do

Agilent B1500 User’s Guide, Edition 7 9-47If You Have a ProblemError Codes500011 License device not found. Connect the license device for EasyEXPERT

9-48 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError CodesAgilent FLEX Execution ErrorWhen Agilent B1500 causes errors in Agilent FLE

Agilent B1500 User’s Guide, Edition 7 9-49If You Have a ProblemError CodesFor a log sweep, the polarity of the start and stop values must be the same

9-50 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError CodesThe internal variables %In and %Rn are not available for the ACH, VAR, and

Agilent B1500 User’s Guide, Edition 7 9-51If You Have a ProblemError CodesSend the TM1 command to use the GPIB GET command (TRIGGER statement in HP BA

9-52 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes225 Send WSV, WSI, or WNX to get sync sweep data.If you enable data outpu

Agilent B1500 User’s Guide, Edition 7 9-53If You Have a ProblemError Codes242 QSCV measurement was aborted.Quasi-static CV measurement was aborted by

9-54 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes270 Search source channel must be set.Before triggering the search measure

Agilent B1500 User’s Guide, Edition 7 9-55If You Have a ProblemError CodesBefore triggering the pulsed spot C measurement, send the PDCV command to se

Agilent B1500 User’s Guide, Edition 7 2- 5IntroductionOverview• Agilent 16445A Selector AdapterUsed to connect the 16440A selector to the B1500A. Two

9-56 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes312 SCUU control cable was connected/disconnected.The B1500 must be turned

Agilent B1500 User’s Guide, Edition 7 9-57If You Have a ProblemError Codes603 Sweep and pulse channels must be different.Set the sweep source and the

9-58 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError CodesThe time stamp function is not available for the binary data output format.

Agilent B1500 User’s Guide, Edition 7 9-59If You Have a ProblemError Codes683 Frequency index is not available for CMU correction.684 AC Voltage is

9-60 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError CodesSet the appropriate count value to SPRM.2105 Specified load voltage is out

Agilent B1500 User’s Guide, Edition 7 9-61If You Have a ProblemError CodesSet the appropriate value to CORRSER?. The period value must be more than de

9-62 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError CodesSet the appropriate pattern data to ALW. The output level value in the patt

Agilent B1500 User’s Guide, Edition 7 9-63If You Have a ProblemError Codes3301 Specified output voltage is out of absolute limits.Check the output vo

9-64 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes3312 Specified ALWG measurement interval time is out of absolute limits.Ch

Agilent B1500 User’s Guide, Edition 7 9-65If You Have a ProblemError CodesCheck the current measurement range and set the correct value.3324 WGMA?,WG

2- 6 Agilent B1500 User’s Guide, Edition 7IntroductionOverviewThe EasyEXPERT has the following measurement execution environments.• Application test•

9-66 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError CodesAgilent B1500A Self-test/Calibration ErrorWhen Agilent B1500 fails the self

Agilent B1500 User’s Guide, Edition 7 9-67If You Have a ProblemError Codes2400 SPGU module is in TEST FAIL state.2401 Digital H/W function test fail

9-68 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes2452 4.5 Vref Internal ADC function test failed.2453 Power Amp initial te

Agilent B1500 User’s Guide, Edition 7 9-69If You Have a ProblemError Codes3013 EEPROM CRC data of RSU calibration data is invalid.3014 Invalid EEPRO

9-70 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes3426 WGFMU EEPROM CRC data is invalid.3427 WGFMU EEPROM CRC data of forma

Agilent B1500 User’s Guide, Edition 7 9-71If You Have a ProblemError Codes3483 PLL not locked in slave module.3484 Reference line is not connected.3

9-72 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError CodesN771 SMU failed VF offset calibration.N772 SMU failed VF gain calibration

Agilent B1500 User’s Guide, Edition 7 9-73If You Have a ProblemError CodesN807 CMU failed Vch full scale measurement.N808 CMU failed nominal gain me

9-74 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError CodesN849 CMU failed PLL0 test.N850 CMU failed PLL0 lock test.N851 CMU failed

Agilent B1500 User’s Guide, Edition 7 9-75If You Have a ProblemError CodesN877 SCUU failed LRL test.N880 CMU failed Hcur AC and VRD Fm test.N881 CM

Agilent B1500 User’s Guide, Edition 7 2- 7IntroductionFront ViewFront ViewThis section describes the front view of Agilent B1500A.1. Standby switchTur

9-76 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError CodesN907 CMU failed Rr/Rf 1kohm test.N908 CMU failed Rr/Rf 10kohm test.N909

Agilent B1500 User’s Guide, Edition 7 9-77If You Have a ProblemError CodesSetup File Converter Execution ErrorThe followings are the error code for th

9-78 Agilent B1500 User’s Guide, Edition 7If You Have a ProblemError Codes

10 Application Library and Utilities

10-2 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesThis chapter introduces the application library and utility programs includ

Agilent B1500 User’s Guide, Edition 7 10-3Application Library and UtilitiesApplication Test DefinitionsApplication Test DefinitionsAgilent EasyEXPERT

10-4 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesApplication Test DefinitionsTable 10-1 Application Test DefinitionsCategory

Agilent B1500 User’s Guide, Edition 7 10-5Application Library and UtilitiesApplication Test DefinitionsBJT Ic-Vc Pulse Ib[3] B1500A,4155B/C,4156B/C SM

10-6 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesApplication Test DefinitionsCMOS Id-Vg[3] B1500A,4155B/C,4156B/C SMU 3IonIo

Agilent B1500 User’s Guide, Edition 7 10-7Application Library and UtilitiesApplication Test DefinitionsMemory NandFlash2 Retention(WrittenCell)B1500A

2- 8 Agilent B1500 User’s Guide, Edition 7IntroductionFront View3. OSD buttonsLCD Off enables or disables the LCD panel. The green LED lights when the

10-8 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesApplication Test DefinitionsMemory NorFlash Vth(ErasingTimeDependence)B1500

Agilent B1500 User’s Guide, Edition 7 10-9Application Library and UtilitiesApplication Test DefinitionsNanoTech CNT Id-Vd B1500A,4155B/C,4156B/C SMU 4

10-10 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesApplication Test DefinitionsReliability EM Istress[2] B1500A SMU 2EM Istre

Agilent B1500 User’s Guide, Edition 7 10-11Application Library and UtilitiesApplication Test DefinitionsStructure Diode BVAndCj-V ASU B1500A MFCMU 1,

10-12 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesApplication Test DefinitionsNOTE If you delete a test definitionApplicatio

Agilent B1500 User’s Guide, Edition 7 10-13Application Library and UtilitiesQSCV Measurement Supplemental DataQSCV Measurement Supplemental DataThis s

10-14 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-1 Maximum Measurement Value Us

Agilent B1500 User’s Guide, Edition 7 10-15Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-3 Maximum Measurement Value Us

10-16 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-5 Maximum Measurement Value Us

Agilent B1500 User’s Guide, Edition 7 10-17Application Library and UtilitiesQSCV Measurement Supplemental DataConsidering Measurement AccuracyNOTE The

Agilent B1500 User’s Guide, Edition 7 2- 9IntroductionFront View11. DVD-ROM/CD-ROM/CD-RW driveFor data backup, B1500A update, or data transfer.12. Tou

10-18 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataTable 10-2 Constant Value for Calculatin

Agilent B1500 User’s Guide, Edition 7 10-19Application Library and UtilitiesQSCV Measurement Supplemental DataTable 10-3 Constant Value for Calculatin

10-20 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental Data100 nA Ap 0.06 0.06 0.06 0.06 0.07 0.07B

Agilent B1500 User’s Guide, Edition 7 10-21Application Library and UtilitiesQSCV Measurement Supplemental DataTable 10-4 Constant Value for Calculatin

10-22 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental Data100 nA Ap 0.06 0.06 0.07 0.07 0.09Bp 0.0

Agilent B1500 User’s Guide, Edition 7 10-23Application Library and UtilitiesQSCV Measurement Supplemental DataTable 10-5 Conditions for Calculating Me

10-24 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-6 Calculation Example of Measu

Agilent B1500 User’s Guide, Edition 7 10-25Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-7 Calculation Example of Measu

10-26 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-8 Calculation Example of Measu

Agilent B1500 User’s Guide, Edition 7 10-27Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-9 Calculation Example of Measu

2- 10 Agilent B1500 User’s Guide, Edition 7IntroductionRear ViewRear ViewThis section describes the rear view of Agilent B1500A.1. Serial numberYou ne

10-28 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-10 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 10-29Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-11 Calculation Example of Meas

10-30 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-12 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 10-31Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-13 Calculation Example of Meas

10-32 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-14 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 10-33Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-15 Calculation Example of Meas

10-34 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-16 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 10-35Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-17 Calculation Example of Meas

10-36 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-18 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 10-37Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-19 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 2- 11IntroductionRear View3. LINE input receptacleAC power cable is connected to this receptacle.4. GPIB interfa

10-38 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-20 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 10-39Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-21 Calculation Example of Meas

10-40 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-22 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 10-41Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-23 Calculation Example of Meas

10-42 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-24 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 10-43Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-25 Calculation Example of Meas

10-44 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-26 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 10-45Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-27 Calculation Example of Meas

10-46 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-28 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 10-47Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-29 Calculation Example of Meas

• DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENTBecause of the danger of introducing additional hazards, do not install substitute parts or perform any

2- 12 Agilent B1500 User’s Guide, Edition 7IntroductionRear View8. GNDU terminal0 V constant voltage source. Used for the reference of measurement gro

10-48 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesQSCV Measurement Supplemental DataFigure 10-30 Calculation Example of Meas

Agilent B1500 User’s Guide, Edition 7 10-49Application Library and UtilitiesLicense Management ToolLicense Management ToolThe licence management tool

10-50 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesSetup File ConverterSetup File ConverterThe setup file converter is the pr

Agilent B1500 User’s Guide, Edition 7 10-51Application Library and UtilitiesSetup File ConverterSetup File Converter GUIThe setup file converter provi

10-52 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesUtility ProgramsUtility ProgramsThe following useful programs are stored i

Agilent B1500 User’s Guide, Edition 7 10-53Application Library and UtilitiesUtility ProgramsSetupFileConverter.exeThis program is the script version o

10-54 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesUtility ProgramsXTS file creation example 1The .XTS file can be created by

Agilent B1500 User’s Guide, Edition 7 10-55Application Library and UtilitiesUtility ProgramsTo read XTS file Use the import function to read the creat

10-56 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesUtility Programssleep.exeThis execution file is used to put a wait time in

Agilent B1500 User’s Guide, Edition 7 10-57Application Library and UtilitiesUtility ProgramsXSLTThe XSLT (XSL-Transformation, eXtensible Stylesheet La

Agilent B1500 User’s Guide, Edition 7 2- 13IntroductionRear ViewA. GNDU/ADCGround unit and A/D converter module. Always installed in the B1500A.B. SPG

10-58 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesUtility ProgramsTable 10-7 XSLT Filter FilesGroup File name Description1 •

Agilent B1500 User’s Guide, Edition 7 10-59Application Library and UtilitiesUtility ProgramsTable 10-8 Example of the data exported by using the XSLT

10-60 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesUtility ProgramsTable 10-11 Example of the data exported by using the XSLT

Agilent B1500 User’s Guide, Edition 7 10-61Application Library and UtilitiesUtility ProgramsFilter File Modification ExampleThis section explains the

10-62 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesUtility ProgramsFigure 10-31 Modification Example[VOWHPSODWHPDWFK VW

Agilent B1500 User’s Guide, Edition 7 10-63Application Library and UtilitiesUtility ProgramsTable 10-12 Example of the data exported by using the filt

10-64 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesUtility ProgramsTable 10-14 Filter File Reference NameReference name Descr

Agilent B1500 User’s Guide, Edition 7 10-65Application Library and UtilitiesUtility ProgramsTable 10-15 Export Data Components for Classic Test Result

10-66 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesUtility ProgramsTable 10-16 Export Data Components for Application Test Re

Agilent B1500 User’s Guide, Edition 7 10-67Application Library and UtilitiesDesktop EasyEXPERTDesktop EasyEXPERTThe Desktop EasyEXPERT software CD-ROM

2- 14 Agilent B1500 User’s Guide, Edition 7IntroductionRear ViewIn the EasyEXPERT operation mode, the SPGU outputs can be specified by the PG number.

10-68 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesDesktop EasyEXPERTAbout Desktop EasyEXPERTThe Desktop EasyEXPERT software

Agilent B1500 User’s Guide, Edition 7 10-69Application Library and UtilitiesDesktop EasyEXPERTSystem RequirementsThe following are the minimum require

10-70 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesDesktop EasyEXPERTTo Install Desktop EasyEXPERTTo install Desktop EasyEXPE

Agilent B1500 User’s Guide, Edition 7 10-71Application Library and UtilitiesDesktop EasyEXPERTTo Start Desktop EasyEXPERTTo launch Desktop EasyEXPERT,

10-72 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesDesktop EasyEXPERTStart EasyEXPERT windowThe Start EasyEXPERT window provi

Agilent B1500 User’s Guide, Edition 7 10-73Application Library and UtilitiesDesktop EasyEXPERTTo Change Execution Mode and GPIB SettingsTo change the

10-74 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesDesktop EasyEXPERTUsing 4155B/4156B/4155C/4156CThis section describes the

Agilent B1500 User’s Guide, Edition 7 10-75Application Library and UtilitiesDesktop EasyEXPERTCalibration Differences on Calibration window• Calibrati

10-76 Agilent B1500 User’s Guide, Edition 7Application Library and UtilitiesDesktop EasyEXPERTAdvanced Setup Differences on Advanced Setup• Series R a

Agilent B1500 User’s Guide, Edition 7 2- 15IntroductionRear ViewWARNING There are potentially hazardous voltages (200 V for HPSMU, and 100 V for MPSMU

2- 16 Agilent B1500 User’s Guide, Edition 7IntroductionMeasurement UnitsMeasurement UnitsAgilent B1500A can be equipped with the following measurement

Agilent B1500 User’s Guide, Edition 7 2- 17IntroductionMeasurement UnitsAbout SMUSource/monitor unit (SMU) can apply DC voltage or current, and can me

2- 18 Agilent B1500 User’s Guide, Edition 7IntroductionMeasurement UnitsB1510A High Power SMUThis section describes typical specification of the high

Agilent B1500 User’s Guide, Edition 7 2- 19IntroductionMeasurement UnitsTable 2-1 HPSMU Output Voltage Ranges and Resolutions Table 2-2 HPSMU Output C

2- 20 Agilent B1500 User’s Guide, Edition 7IntroductionMeasurement UnitsTable 2-3 HPSMU Measurement Voltage Values and Resolutions Table 2-4 HPSMU Mea

Agilent B1500 User’s Guide, Edition 7 2- 21IntroductionMeasurement UnitsB1511A Medium Power SMUThis section describes typical specification of the med

Safety SymbolsThe general definitions of safety symbols used on equipment or in manuals are listed below.Instruction manual symbol: the product will b

2- 22 Agilent B1500 User’s Guide, Edition 7IntroductionMeasurement UnitsTable 2-5 MPSMU Output Voltage Ranges and Resolutions Table 2-6 MPSMU Output C

Agilent B1500 User’s Guide, Edition 7 2- 23IntroductionMeasurement UnitsTable 2-7 MPSMU Measurement Voltage Values and Resolutions Table 2-8 MPSMU Mea

2- 24 Agilent B1500 User’s Guide, Edition 7IntroductionMeasurement UnitsB1517A High Resolution SMUThis section describes typical specification of the

Agilent B1500 User’s Guide, Edition 7 2- 25IntroductionMeasurement UnitsTable 2-9 HRSMU Output Voltage Ranges and Resolutions Table 2-10 HRSMU Output

2- 26 Agilent B1500 User’s Guide, Edition 7IntroductionMeasurement UnitsTable 2-11 HRSMU Measurement Voltage Values and Resolutions Table 2-12 HRSMU M

Agilent B1500 User’s Guide, Edition 7 2- 27IntroductionMeasurement UnitsNOTE To connect ASUThe specifications are satisfied and guaranteed for the exc

2- 28 Agilent B1500 User’s Guide, Edition 7IntroductionMeasurement UnitsB1520A Multi Frequency CMUThis section describes typical specification of the

Agilent B1500 User’s Guide, Edition 7 2- 29IntroductionMeasurement UnitsTable 2-13 Measurement ParametersPrimary Parameter Secondary ParameterR (resis

2- 30 Agilent B1500 User’s Guide, Edition 7IntroductionMeasurement UnitsTable 2-14 Measurement Range for Fixed Ranging ModeFigure 2-6 Impedance vs Fre

Agilent B1500 User’s Guide, Edition 7 2- 31IntroductionMeasurement UnitsB1525A High Voltage SPGUThis section describes key specification of the high v

HIGH VOLTAGE SHOCK HAZARDAgilent B1500 can force dangerous voltages (200 V for HPSMU, and 100 V for MPSMU/HRSMU) at the force, guard, and sense termin

2- 32 Agilent B1500 User’s Guide, Edition 7IntroductionMeasurement UnitsB1530A WGFMUThis section describes typical specification of the waveform gener

Agilent B1500 User’s Guide, Edition 7 2- 33IntroductionSpecificationsSpecifications This section lists specifications and supplemental information for

2- 34 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsSpecification ConditionsThe measurement and output accuracy are specified at the

Agilent B1500 User’s Guide, Edition 7 2- 35IntroductionSpecificationsMainframeThe B1500A supports ten slots for plug-in modules.• Maximum module confi

2- 36 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsWhen one or more WGFMU modules are installed in the B1500A mainframe, the followi

Agilent B1500 User’s Guide, Edition 7 2- 37IntroductionSpecificationsMPSMU/HRSMUMPSMU: Medium Power Source/Monitor UnitHRSMU: High Resolution Source/M

2- 38 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsTable 2-15 Voltage range, resolution, and accuracy (high resolution ADC)Table 2-1

Agilent B1500 User’s Guide, Edition 7 2- 39IntroductionSpecificationsTable 2-17 Voltage range, resolution, and accuracy (high speed ADC)Table 2-18 Cur

2- 40 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsASUASU: Atto Sense and Switch Unit• Maximum voltage, AUX path100 V (AUX input to

Agilent B1500 User’s Guide, Edition 7 2- 41IntroductionSpecificationsHPSMUHPSMU: High Power Source/Monitor Unit• Voltage range, resolution, and accura

高電圧感電注意Agilent B1500 のフォース、ガード、センス端子には、危険電圧が出力されることがあります（HPSMU の場合は最大± 200 Vdc、MPSMU/HRSMU の場合は最大± 100 Vdc）。感電事故防止のため、必ず以下の事柄を守ってください。•3極電源ケーブルを使用して A

2- 42 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsTable 2-19 Voltage range, resolution, and accuracy (high resolution ADC)Table 2-2

Agilent B1500 User’s Guide, Edition 7 2- 43IntroductionSpecificationsTable 2-21 Voltage range, resolution, and accuracy (high speed ADC)Table 2-22 Cur

2- 44 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsSMU Common Specifications• Output terminal/connectionDual triaxial connector, Kel

Agilent B1500 User’s Guide, Edition 7 2- 45IntroductionSpecificationsPeriod ≥ Width+2 ms (when Width ≤ 100 ms)Period ≥ Width+10 ms (when Width &g

2- 46 Agilent B1500 User’s Guide, Edition 7IntroductionSpecifications• Maximum guard offset voltage± 1 mV (HPSMU)± 3 mV (MPSMU, HRSMU)± 4.2 mV (HRSMU

Agilent B1500 User’s Guide, Edition 7 2- 47IntroductionSpecificationsTable 2-23 Voltage range, resolution, and accuracy (high speed ADC), supplemental

2- 48 Agilent B1500 User’s Guide, Edition 7IntroductionSpecificationsMFCMUMFCMU: Multi Frequency Capacitance Measurement Unit• Measurement functions•

Agilent B1500 User’s Guide, Edition 7 2- 49IntroductionSpecifications• DC bias function•DC biasRange: 0 to ± 25 VResolution: 1 mVAccuracy: ± (0.5 % +

2- 50 Agilent B1500 User’s Guide, Edition 7IntroductionSpecifications• Measurement accuracyMeasurement accuracy at the measurement port of the MFCMU o

Agilent B1500 User’s Guide, Edition 7 2- 51IntroductionSpecificationsTable 2-25 Parameters EPOSC, ZOSCVosc is oscillator level in mV.Table 2-26 Parame