10-14 Agilent B1500 User’s Guide, Edition 7
Application Library and Utilities
QSCV Measurement Supplemental Data
Figure 10-1 Maximum Measurement Value Using 10 pA and 100 pA Range: HRSMU/ASU
Figure 10-2 Maximum Measurement Value Using 1 nA Range:
HPSMU/MPSMU/HRSMU/ASU
1.00E-15
1.00E-14
1.00E-13
1.00E-12
1.00E-11
1.00E-10
1.00E-09
1.00E-08
1.00E-07
1.00E-06
0.001 0.01 0.1 1
QSCV Measurement Voltage (V)
Capacitance (F)
2s
1s
500ms
1.00E-12
1.00E-11
1.00E-10
1.00E-09
1.00E-08
1.00E-07
1.00E-06
1.00E-05
0.001 0.01 0.1 1
QSCV Measurement Voltage (V)
Capacitance (F)
300ms
100ms
50ms
30ms
Integration
Time
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