Agilent Technologies 16440A Wartungshandbuch

Agilent Technologies Agilent B1500A Semiconductor Device AnalyzerSelf-paced Training Manual

Required Devices for Class ExercisesTo perform the class exercises, you need the device set (Agilent part number 04156-87001) which contains the follo

Module 9Modifying Application Test Definitions9-10To Modify Test DefinitionTest Definition editorDefine Test Output and Analysis ParametersThis exampl

Module 9Modifying Application Test Definitions9-11To Modify Test DefinitionAdd local variable (ex: Yes for Message box)Test Definition editorVariable

Module 9Modifying Application Test Definitions9-12To Modify Test DefinitionDefine Message boxTest Definition editorThis setup makes the OK button on t

Module 9Modifying Application Test Definitions9-13To Modify Test DefinitionExample: Displaying Message boxIn this modification example, the message bo

Module 9Modifying Application Test Definitions9-14Class ExercisePerform the following modification example.1. Open Id-Vd test definition.2. Modify it

Module 9Modifying Application Test Definitions9-15To Use Debug ToolsBreak pointReturnPort = SMU1ReturnCh = OUT1Variable InspectorThis slide shows an e

Module 9Modifying Application Test Definitions9-16•Run•Abort•Stop•Break•Inspect To Use Debug ToolsThe Debug tab menu provides the following buttons:•R

Module 9Modifying Application Test Definitions9-17Debug: Inspect buttonBreak pointPaused pointTo Use Debug ToolsThe Variable Inspector is displayed by

Module 9Modifying Application Test Definitions9-18To Resave and Close Your Test DefinitionClose the definition editor, and overwrite your test definit

Module 9Modifying Application Test Definitions9-19To Export/Import Test DefinitionClick Library>Export Test Definition or Import Test DefinitionCan

Required Accessories for Class ExercisesTo perform the class exercises, you need the following accessories. Prepare the accessories shown below.Design

Module 9Modifying Application Test Definitions9-20To Use Built-in FunctionsAbsolute value: abs(A)Averaging: avg(A), mavg(A,B)Data conversion: string(A

Module 9Modifying Application Test Definitions9-21To Use Built-in FunctionsUser function setup examplegm = diff(Id,Vg)gmMax = max(gm)GM_MAX=getVectorD

Module 9Modifying Application Test Definitions9-22To Use Read Out FunctionsMarker index value: @MIX coordinate value: @MX, @CXY coordinate value: @MY,

Module 9Modifying Application Test Definitions9-23To Use Read Out FunctionsAnalysis function setup exampleVth = @L1XThis is an analysis function setup

Module 9Modifying Application Test Definitions9-24To Add Data DisplayAnalysis: Display Data SetupData displayMeasurement, data display, and data saveT

Module 9Modifying Application Test Definitions9-25To Add Data DisplayAdditional data display exampleThis is a test result example displayed on the Dat

Module 9Modifying Application Test Definitions9-26To Use Auto Analysis FunctionAnalysis: Auto Analysis• Line 1• Line 2• MarkerGM=GM_MAXThe Auto Analys

Module 9Modifying Application Test Definitions9-27To Control Test Result Data OutputsAnalysis: Data Display ControlData Display: OFF/ONMiscellaneous:

Module 9Modifying Application Test Definitions9-28To Use Test Setup Internal VariablesFrom Display Setup screen of Classic Test setupAssign to externa

Module 9Modifying Application Test Definitions9-29To Use Test Setup Internal Variables Setup exampleAssign to external variables…This example makes th

To perform the flash memory class exercise in Module 13 and if you use the ASU, you need the following accessories.To perform the flash memory class e

Module 9Modifying Application Test Definitions9-30To Use Test Setup Internal Variables Result exampleThis is a result example of the test output setup

Module 9Modifying Application Test Definitions9-31To Use Test Setup Internal Variables Using built-in functionsLocal Variables DefinitionBLOCKIdVgVG =

Module 9Modifying Application Test Definitions9-32To Use Test Setup Internal Variables Using built-in functions, setup exampleThis example sets the fo

Module 9Modifying Application Test Definitions9-33To Use Test Setup Internal Variables Using built-in functions, result exampleThis is a result exampl

Module 9Modifying Application Test Definitions9-34z Make two kinds of MOS threshold voltage (Vth) measurementsz Observe how the user functions and ana

Module 9Modifying Application Test Definitions9-35To Modify Test DefinitionOpening Vth gmMax test definition 12341. Select the CMOS category.2. Open t

Module 9Modifying Application Test Definitions9-36To Modify Test DefinitionSetting properties of numeric variable11321. Save the test setup as a new o

Module 9Modifying Application Test Definitions9-37To Modify Test DefinitionAnalysis function setup 13241. Display the Test Contents screen.2. Highligh

Module 9Modifying Application Test Definitions9-38Auto Analysis SetupAuto Analysis Setup12Check this box.1. Click the Auto Analysis Setup tab to displ

Module 9Modifying Application Test Definitions9-39To Set Display SetupDisplay Setup1231. Click the Display Setup tab.2. Click Add button to display th

ContentsContents-1Module 1. Introduction• New Features• EasyEXPERT• To Perform Easy Application Test• User Interface• Modular Mainframe• SCUU/GSWU• AS

Module 9Modifying Application Test Definitions9-40Auto Analysis SetupThe 2ndAuto Analysis Setup123456Idrain=Id@Vth*Polarity1. Display the Test Content

Module 9Modifying Application Test Definitions9-41To Use Auto Analysis TwiceResult exampleThis is a result example of using two times Auto Analysis sh

Module 9Modifying Application Test Definitions9-42Class ExerciseTo Use Vector Data.1. Open the Cgg-Vg test definition.2. Modify it for the multiple fr

Module 9Modifying Application Test Definitions9-43To Modify Test DefinitionOpening Cgg-Vg test definition 12341. Select the CMOS category.2. Open the

Module 9Modifying Application Test Definitions9-44To Modify Test DefinitionSetting properties of vector variable123411. Save the test setup as a new o

Module 9Modifying Application Test Definitions9-45To Modify Test DefinitionSetting vector data211. Click the Grid button of the FREQ variable. The De

Module 9Modifying Application Test Definitions9-46To Modify Test DefinitionUsing the at( ) function to read vector data 2131. Display the Test Content

ContentsContents-2Module 3. Data Display and Management• Data Display window• Graph Analysis Tools• Data Status• To Change Graph/List/Display Setup• T

ContentsContents-3Module 5. Basic Measurement• SMU Fundamentals• Classic Test Environment• SMUs Connected in Series or Parallel• Cabling and Fixture I

ContentsContents-4Module 7. Measurement Functions• SMU Pulsed Sweep Measurement• I/V-t Sampling Measurement• Negative Hold Time for High Speed Samplin

ContentsContents-5Module 9. Modifying Application Test Definitions• To Open Application Test Definition • To Modify Test Definition • To Use Debug Too

ContentsContents-6Module 11. Advanced Definitions and Operations• To Control External GPIB Devices• To Call Execution Files• To Perform Repeat Measure

ContentsContents-7Module 13. SPGU Control and Applications• High Voltage SPGU• SPGU Control• Pulse Generator Mode• Charge Pumping• Flash Memory Test•

Notices© Agilent Technologies 2005 - 2008No part of this manual may be reproduced in any form or by any means (including electronic storage and retrie

ContentsContents-8

7 Measurement Functions

Module 7Measurement Functions7-2In This Module• SMU Pulsed Sweep Measurement• I/V-t Sampling Measurement• Negative Hold Time for High Speed Sampling•

Module 7Measurement Functions7-3z Use PULSE mode for precise force/measure timingz Pulse down to 500 μs widthz Use current ranges from 1 nA to 1 A (H

Module 7Measurement Functions7-4hold timepulse periodpulse widthstopstartbaseoutput voltageor currenttimeSMU Pulse ModeVAR1 SweepWhen you select VPULS

Module 7Measurement Functions7-5VAR1PrimaryVAR2SecondarySMU Pulse ModePulse On Primary SourceOne SMU can pulse while another follows. Either VAR1 or

Module 7Measurement Functions7-6z Use the HPSMU or GNDU as the current return pathz Use Kelvin connections (must use on GNDU)z Use 16493L GNDU cable f

Module 7Measurement Functions7-7z Minimum pulse width is 500 usz Only one pulsed source is availablez Only one measurement channel is availablez Measu

Module 7Measurement Functions7-8z You will observe a MOS FET family of curves z You will edit VAR1 from V mode to VPULSE modez You will learn how to p

Module 7Measurement Functions7-916442A/B FixtureB1500A Rear ViewSMU4SMU3SMU2SMU1CMUGNDUSMU Triax ConnectionForce Lines to Fixture 1,2,3,4 PortsThis is

Module 7Measurement Functions7-10123 4567891011121314 15161718201921222324252726281415281FG3FG4FG5FG6FG2FG1SMU21VMU21VSUFSGNDUF2F1PGU1: Substrate2: So

Module 7Measurement Functions7-11VPULSE Data Display WindowMake a measurement to verify the setup is correct. You should see the above family of curv

Module 7Measurement Functions7-12Drain pulseEnter new name before saveVPULSE Channel SetupSwitch VAR1 from V mode to VPULSE mode. A new panel will po

Module 7Measurement Functions7-13This box pops up only if VPULSE or IPULSE is set on Channel Setup.Range and ADC/Integare disabledMaximum measurement

Module 7Measurement Functions7-14IntervalHold TimeStarts samplingVoltage or currentChannel 1 outputVoltage or currentChannel 2 outputBias hold timeMea

Module 7Measurement Functions7-15z LINEARz Sampling interval: >= 2 ms0.1 ms to 1.99 ms (limited)z Number of samples: 1 to 100001z LOGz Sampling int

Module 7Measurement Functions7-16z Monitor the charging voltage of an RC circuitz Learn LOG10 data intervalz Learn how to properly define a sampling a

Module 7Measurement Functions7-171 23 456789101112131415161718201921222324252726281415281FG3FG4FG5FG6FG2FG1SMU21VMU21VSUFSGNDUF2F1PGU28: SMU125: SMU22

Module 7Measurement Functions7-1810 data10 data10 dataY dataX dataX + Y = 202 ms200 s5 decadesSampling Exercise – LOG10, 2 ms intervalRC MeasurementTh

Module 7Measurement Functions7-1910 data/decade10 data/decade10 data/decadeSampling Exercise – LOG10, 2 ms interval

In This ManualThis document is the self-paced training manual to help you to understand what is Agilent B1500A, what functions the B1500A has, how to

Module 7Measurement Functions7-20Variable for time dataSampling ExerciseChannel Setup

Module 7Measurement Functions7-21High speed ADC FIXED range Sampling ExerciseMeasurement SetupUse the FIXED range and the high speed A/D converter to

Module 7Measurement Functions7-22-90 ms =< Hold Time =< -0.1 ms, 0.1 ms stepBias starts at 0 s Negative Hold Time Available for Interval < 2

Module 7Measurement Functions7-231 23 456789101112131415161718201921222324252726281415281FG3FG4FG5FG6FG2FG1SMU21VMU21VSUFSGNDUF2F1PGU28: SMU125: SMU20

Module 7Measurement Functions7-24Negative Hold Time Interval < 2 ms Current source Negative Hold TimeChannel and Measurement Setup

Module 7Measurement Functions7-25GM max*Early VoltageVthIsub maxHands-off markerand line fittingAuto AnalysisAuto analysis automates the task of doing

Module 7Measurement Functions7-26Auto AnalysisVth ExampleHere we see a full-featured example of auto analysis. GMmax and Vth are automatically calcul

Module 7Measurement Functions7-27z Plot square root of the drain current (SQRT Id)z Plot rate of change of SQRT Id (PEAK)z Find Peak Value of the PE

Module 7Measurement Functions7-28z Make a MOS threshold voltage (Vth) measurementz Observe how parameters for the analysis are definedz Observe how th

Module 7Measurement Functions7-29GoodContinuous CurveNo Static DamageBADBroken-Lumpy CurveSevere Static Damage**Vth MeasurementDamaged MOS FET Device?

• Module 11. Advanced Definitions and OperationsThis module explains how to control external GPIB devices, how to call an execution file, how to perfo

Module 7Measurement Functions7-30Vth MeasurementChannel and Measurement SetupNothing new here. This slide is included for completeness. You will not

Module 7Measurement Functions7-31Vth MeasurementFunction SetupHere are definitions for the Y1-axis plot (SQRT_ID) and the Y2-axis plot (PEAK). @L1X m

Module 7Measurement Functions7-32Vth MeasurementDisplay Setup PageVTH and BETA are values which will be displayed at the Parameters area on the Data D

Module 7Measurement Functions7-33Auto AnalysisAnalysis Setup PageThis screen is the heart of auto analysis. You define custom procedures for graphica

Module 7Measurement Functions7-34V/I DACFilter OFFFilter ONTimeFilter settingSMU (V or I mode)ForceSenseSeries Resistor(1 M ohm)SMU FilterThe filter i

Module 7Measurement Functions7-35SMU Filter: ON (add filter)or OFF (no filter)SMU FilterTo change the SMU filter setup, open the Advanced Setup window

Module 7Measurement Functions7-36Series Resistor(1 M ohm)SMU ForceSenseGuardSense line is internally disconnected during the series resistor is connec

Module 7Measurement Functions7-37z Measure 0.5 M ohm without Series Resistorz Measure the same device with Series Resistorz Learn how the Series Resis

Module 7Measurement Functions7-381 23 456789101112131415161718201921222324252726281415281FG3FG4FG5FG6FG2FG1SMU21VMU21VSUFSGNDUF2F1PGU28: SMU125: SMU20

Module 7Measurement Functions7-390.5 M ohm (device only)1.5 M ohm (with Series Resistor)SMU Series ResistorThe measurement result without the SMU seri

Class Exercises Class exercises use the test setup listed below. The test setup data are only examples and included in the Demo.xpg file stored in the

Module 7Measurement Functions7-40Series R: 1MOHM (add 1 M ohm)or NONE (thru)SMU Series ResistorTo change the SMU series resistor setup, open the Advan

Module 7Measurement Functions7-41to draw regression lineto get slope of the lineSMU Series ResistorFunction Setup and Auto Analysis SetupThe analysis

Module 7Measurement Functions7-42Calculated value1.5 M ohm (with Series Resistor)SMU Series ResistorCompensationIf you use the SMU series resistor, yo

Module 7Measurement Functions7-43Standby FunctionStandby function sets any SMUs (except HRSMU with ASU) to specific output values and compliances befo

Module 7Measurement Functions7-44To Use Standby FunctionClick the Standby Channel Definition button to open the Standby Channel Definition window.Defi

Module 7Measurement Functions7-45CONSTVAR2VAR2CONSTBias Hold ONBias Hold OFFVAR1/VAR1’/CMUVAR1/VAR1’/CMUSource or Base value for SamplingStop or S

Module 7Measurement Functions7-46z Perform Repeat Measurementz Measure the LED I-V characteristicsz Monitor LED during Repeat Measurementz Use the con

Module 7Measurement Functions7-471 23 456789101112131415161718201921222324252726281415281FG3FG4FG5FG6FG2FG1SMU21VMU21VSUFSGNDUF2F1PGU1314Shorter LeadJ

Module 7Measurement Functions7-48SMU1 Function to VAR1Vh = 0 to 2.5 VBias Hold to ONOutput Value to STOP Bias Hold ExerciseChannel and Measurement Set

Module 7Measurement Functions7-49Repeats three timesClick Run to start measurementRepeat buttonBias Hold ExerciseRepeat Measurement SetupClick Repeat

NOTE Demo.xpg fileDemo.xpg file is required to create the Demo preset group which contains the test setup data used by the class exercises. And it is

Module 7Measurement Functions7-50LED lights onLED lights offBias Hold ExerciseDuring the measurement, leave the fixture lid open. And monitor the LED

8 Capacitance Measurement

Module 8Capacitance Measurement8-2In This Module• CMU Fundamentals• Classic Test Environment• CMU Calibration• SCUU for IV/CV Switching • GSWU for Acc

Module 8Capacitance Measurement8-3• Occupies 1 slot of B1500A• Four terminal pair configuration• Spot & Sweep measurements • Faster measurement ti

Module 8Capacitance Measurement8-4CMUCMU Block DiagramFour-Terminal Pair ConfigurationGenerally, any mutual inductance, interference of the measuremen

Module 8Capacitance Measurement8-5Single SweepDouble SweepLinear SweepUp to +/- 25 V, using only CMUUp to +/- 100 V, using SCUU (Agilent N1301A-100)C-

Module 8Capacitance Measurement8-6z You will make the MOS FET Cgs-Vg measurementz You will learn how to properly define a C-V sweep algorithmz Use the

Module 8Capacitance Measurement8-716442A/B FixtureB1500A Rear ViewSMU4SMU3SMU2SMU1CMUGNDUCable ConnectionsThe following cables are required to perform

Module 8Capacitance Measurement8-8123 4567891011121314 15161718201921222324252726281415281FG3FG4FG5FG6FG2FG1SMU21VMU21VSUFSGNDUF2F1PGU1: Substrate2: S

Module 8Capacitance Measurement8-9CgsConductanceCapacitance Measurement Measurement ExampleThis is the measurement example of the MOS FET Cgs-Vg chara

Test Setup for Class ExercisesThe Demo preset group contains the following test setup. The setup data are only examples for the class exercises. The f

Module 8Capacitance Measurement8-10DC bias:-5 V to +5 VFrequencyand Oscillation levelIntegration timeSelects measurement parametersCapacitance Measure

Module 8Capacitance Measurement8-11Open terminalsCorrects phase error caused by extending measurement cables.Phase CompensationConnect standardCorrect

Module 8Capacitance Measurement8-12CalibrationOpens dialog box to start correction/compensation.CMU CalibrationOpen the Calibration window and click t

Module 8Capacitance Measurement8-13SCUU Output: Force1/CMUHForce2/CMULTriaxial CableManipulator/PositionerSwitches CV/IVB1500A with SCUUSCUU – for IV/

Module 8Capacitance Measurement8-14B1500A Rear ViewSMU4SMU3SMU2SMU1CMUGNDUCMUL or SMU4 ForceCMUH or SMU5 ForceSMU516442A/B FixtureSCUU Connection Exam

Module 8Capacitance Measurement8-15CMUSMU CMU Unify Unit (SCUU)SCUU cableSMUSMUForce1 or CMUHForce2 or CMULSense1Sense2SCUU Connection Example – SCUU

Module 8Capacitance Measurement8-16HcHpLpLcCMU cable or SCUU cableExtension cableCMUManipulator or PositionerDUT4TP configurationShielded 2T configura

Module 8Capacitance Measurement8-17SCUU Output: Force1/CMUHForce2/CMULTriaxial CableManipulator/PositionerGSWUCVIVGuardForce GuardForce GSWU Control C

Module 8Capacitance Measurement8-18To CMU Hpot/HcurASU 2ASU 1To HRSMU 1CMUH or ForceCMUL orForceSenseSenseCMU return pathTo CMU Lpot/LcurTo HRSMU 2ASU

Module 8Capacitance Measurement8-19B1500A Rear ViewSMU4SMU3SMU2SMU1CMUGNDUHcurHpotLcurLpotSMU3 ForceSMU2 ForceASU1ASU2ASU to CMU/HRSMU Connection Exam

Trng List MOSFET Vth-gmmax measurement using I/V List SweepTrng Multi Multi Channel I/V Sweep (Bipolar transistor and LED)Trng Sampling 0.1 μF samplin

Module 8Capacitance Measurement8-20ConfigurationASU I/O Path: SMU (to use HRSMU)or AUX (to use CMU)ASU Switch ControlTo control the ASU switch connect

9 Modifying Application Test Definitions

Module 9Modifying Application Test Definitions9-2• To Open Application Test Definition • To Modify Test Definition • To Use Debug Tools• To Use Built-

Module 9Modifying Application Test Definitions9-3Modification Overview1. Open an application test definition to be modified2. Open test definition edi

Module 9Modifying Application Test Definitions9-4To Open an Application Test DefinitionExample: Select Vth Const Id as templateClick a test definition

Module 9Modifying Application Test Definitions9-5To Open Test Definition EditorClick Library>Open Definition of This Test…CancelDefine New Test…Ope

Module 9Modifying Application Test Definitions9-6To Save Definition As Your DefinitionSave the definition as your definition (ex: Trng vth)Test Defini

Module 9Modifying Application Test Definitions9-7To Modify Test DefinitionChange default values and add parameters (ex: Pcomp_d)This area sets the pro

Module 9Modifying Application Test Definitions9-8To Modify Test DefinitionChange or set test parameters (ex: Pcomp_d)Test Definition editorOn the Test

Module 9Modifying Application Test Definitions9-9To Modify Test DefinitionChange display setup and define external variablesTest Definition editorExte