Agilent Technologies E5500 Series Betriebsanweisung Seite 1

Agilent TechnologiesAgilent Technologies5500 Scanning Probe MicroscopeUser’s Guide

Agilent 5500 SPM User’s Guide 10ContentsTable of Co ntentsRead This First Specifications 4Laser Safety Information 4Power Supply 5

Contact Mode Imaging 5Agilent 5500 SPM User’s Guide 100two components. Comparing the friction and topography images helps to differentiate the impact

Contact Mode Imaging 5Agilent 5500 SPM User’s Guide 101tip. Higher force can place undue wear on the tip and, in the extreme, can damage the tip or sa

Contact Mode Imaging 5Agilent 5500 SPM User’s Guide 102speed will be 2-5 lines/second for smooth surfaces. For rougher surfaces a lower scan speed may

103Agilent 5500 SPMUser’s GuideAgilent Technologies6AC ModesAcoustic AC Mode (AAC) 104AAC Mode 104Constant Height Mode 109Magnetic AC (MAC) M

AC Modes 6Agilent 5500 SPM User’s Guide 104Acoustic AC Mode (AAC)In Acoustic AC (AAC) Mode AFM, a piezo-electric transducer in the nose assembly drive

AC Modes 6Agilent 5500 SPM User’s Guide 1055Choose Controls > AC Mode to open the ACAFM Controls window (Figure 72).Figure 72 ACAFM Controls window

AC Modes 6Agilent 5500 SPM User’s Guide 106Figure 73 AC Mode Tune window Figure 74 AC Tune window with resonance peak at ~154.4 kHz10 The next step is

AC Modes 6Agilent 5500 SPM User’s Guide 107storage box should indicate the range in which the primary resonance frequency will be found.11 In the uppe

AC Modes 6Agilent 5500 SPM User’s Guide 108Next, bring the tip into contact with the sample. In AAC mode, “contact” occurs when the cantilever oscilla

AC Modes 6Agilent 5500 SPM User’s Guide 10925In the Realtime Images window, make sure that Topography and Deflection are displayed.26 In the Scan and

Agilent 5500 SPM User’s Guide 11ContentsTwo-Piece Nose Assemblies 36Scanner 38Detector 40Sample Plates 41Video System 43Head

AC Modes 6Agilent 5500 SPM User’s Guide 110response to amplitude changes. This lack of feedback reduces signal noise, enabling high resolution imaging

AC Modes 6Agilent 5500 SPM User’s Guide 111MAC III offers additional lock-in amplifiers for other more complex modes as well). Specially coated MAC ca

AC Modes 6Agilent 5500 SPM User’s Guide 1122In the ACAFM Controls dialog box, choose MAC as the Drive Mechanism. Top MAC ModeIn Top MAC Mode AFM, the

AC Modes 6Agilent 5500 SPM User’s Guide 113well-defined resonant peak in MAC Mode makes the method particularly effective.Q Control uses a feedback lo

114Agilent 5500 SPMUser’s GuideAgilent Technologies7Additional Imaging ModesScanning Tunneling Microscopy (STM) 114Current Sensing AFM (CSAFM) 1

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 115available with three different preamplifiers for varying sensitivity (Table 2). Figure 80 S

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 116located beneath the tip, can be field-replaced to adjust the sensitivity if necessary.Figur

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 1175Attach an electrode from the sample plate to the sample. Lift the spring-loaded electrode

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 118Figure 84 Servo window settings for STM imaging10 Enter the Setpoint current, in nanoamps,

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 119Current Sensing AFM (CSAFM)In Current Sensing AFM (CSAFM) an ultra-sharp AFM cantilever, co

Agilent 5500 SPM User’s Guide 12ContentsRemoving the Body of the Two-Piece Nose Assembly 68Inserting a Probe in the Two-Piece Nose Assembly 69Insertin

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 1201 nA/V (blue) or 0.1 nA/V (green). See Table 2 on page 115 for more details.Figure 86 CSAFM

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 1216In PicoView, choose Mode > CSAFM.7 In the Servo window enter the Bias Voltage. Typical

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 12214Watching the video system, bring the tip and sample very close to contact:a Adjust the fo

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 123Lateral Force Microscopy (LFM)Lateral Force Microscopy is a derivative of Contact Mode. Dur

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 124NOTEIt is important in LFM that the LFM signal on the Head Electronics Box be carefully set

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 125Dynamic Lateral Force Microscopy (DLFM)In Dynamic Lateral Force Microscopy (DLFM), a lead z

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 1266Bring the tip close to the sample:a Press the Close switch on the HEB to raise the sample

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 12712In the Scan and Motor window’s Scan tab, enter:a Scan Speed of 1-2 ln/s.b Resolution of 2

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 128For the MAC III controller these connections are made in software.To image in Force Modulat

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 1299Now set up the additional AC oscillation:a Choose Controls > AC Mode to open the ACAFM

Agilent 5500 SPM User’s Guide 13ContentsElectrostatic Force Microscopy (EFM) 130Kelvin Force Microscopy (KFM) 1348 Scanner Maintenance and C

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 130Electrostatic Force Microscopy (EFM)Electrostatic Force Microscopy (EFM) is a qualitative m

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 1316Choose Controls > Advanced > AC Mode. The EFM Controls window will open (Figure 88).

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 13210Bring the tip close to contact with the sample:a Press the Close switch on the HEB to rai

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 133amplitude exceeding 10 V, beyond which the signal will be clipped. The default value is x1

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 134Kelvin Force Microscopy (KFM)Kelvin Force Microscopy (KFM) is similar to EFM. An additional

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 1354Choose Controls > Spectroscopy to open the Spectroscopy window (Figure 90). Figure 90 U

Additional Imaging Modes 7Agilent 5500 SPM User’s Guide 136For more on advanced options for KFM Mode see Chapter 11.

137Agilent 5500 SPMUser’s GuideAgilent Technologies8Scanner Maintenance and CalibrationCare and Handling of the Probes and Scanner 138Probes 138

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 138Care and Handling of the Probes and ScannerProbesAlways store probes at room tem

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 139nose assembly will likely need to be replaced. Use careful handling to avoid dam

Agilent 5500 SPM User’s Guide 14Contents10 MAC ModeList of MAC Mode Components 162Connections 163Hardware and Sample Setup 16411 MAC II

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 140explained below. Though they are explained separately for simplicity, they may n

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 141by an equal and opposite field in the other direction. The effect of hysteresis

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 142movement) and a single tube for Z motion. Since the range is small with these sc

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 143Calibrating the Multi-Purpose ScannerRegular calibration ensures that Agilent mu

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 144X CalibrationIn the Realtime Images window set up two Topography images, one for

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 145X Non-LinearityTo check X non-linearity, in the Realtime Images window choose To

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 146After updating, re-scan the calibration target. The spacing between features sho

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 147X SensitivityUsing the Cross-section tool, measure the length of a set of featur

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 148the slow scanning axis so the range will be reduced as a time consideration. O

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 149If the dimensions are not identical for the two features, adjust the Y Non-linea

Agilent 5500 SPM User’s Guide 15ContentsImaging 207Tips for Temperature Controlled Imaging 20814 Environmental ControlEnvironmental Chamber

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 150on the edge of a feature while the scan was moving upwards. The red marker was p

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 151If the measured dimension does not match the actual, the adjust the Y Sensitivit

Scanner Maintenance and Calibration 8Agilent 5500 SPM User’s Guide 152top and the bottom of the data plot is flat before making the measurement.If the

153Agilent 5500 SPMUser’s GuideAgilent Technologies9Closed-Loop ScannersScanner Types 153Z-Axis Closed-Loop Scanner 153X/Y/Z Closed-Loop Scanner

Closed-Loop Scanners 9Agilent 5500 SPM User’s Guide 154Positional drift that may be present in an open-loop system is continuously corrected with the

Closed-Loop Scanners 9Agilent 5500 SPM User’s Guide 155Figure 106 Scanner Setup window4 The values shown in Figure 106 for the X, Y and Z Sensor Offse

Closed-Loop Scanners 9Agilent 5500 SPM User’s Guide 1567In the Scan and Motor window enter:a A very large number (e.g., 9999) for the Scan Size. It wi

Closed-Loop Scanners 9Agilent 5500 SPM User’s Guide 15711Adjust the X Sensor values:a If the line slopes down from the upper left part of the graph, s

Closed-Loop Scanners 9Agilent 5500 SPM User’s Guide 15817Adjust the Sensitivity of the X sensor:a In the Realtime Images window choose Tools > Hori

Closed-Loop Scanners 9Agilent 5500 SPM User’s Guide 159of the Z piezo is being measured, adjusting the Z Sensor Gain and Offset should be done without

16Agilent 5500 SPMUser’s GuideAgilent Technologies1Introduction to the Agilent 5500Overview of Agilent SPM System 17SPM Basics 18SPM Techniques

Closed-Loop Scanners 9Agilent 5500 SPM User’s Guide 160The goal of the calibration procedure is to make the Z Sensor output appear as in Figure 110: F

Closed-Loop Scanners 9Agilent 5500 SPM User’s Guide 161Once the graph looks like Figure 110, the Offset and Gain are properly set and the Z Sensor is

162Agilent 5500 SPMUser’s GuideAgilent Technologies10MAC ModeList of MAC Mode Components 162Connections 163Hardware and Sample Setup 164The M

MAC Mode 10Agilent 5500 SPM User’s Guide 163Please contact Agilent if any of these items are missing.ConnectionsThe MAC Mode controller is shown in Fi

MAC Mode 10Agilent 5500 SPM User’s Guide 1643Input summed to AAC drive signal.4 Deflection output from detector.5 Amplitude output from lock-in amplif

MAC Mode 10Agilent 5500 SPM User’s Guide 165Chapter 6, “AC Modes.” Please refer to Chapter 6 for more on how to set up the microscope for imaging.In A

166Agilent 5500 SPMUser’s GuideAgilent Technologies11MAC III ModeInitial Setup 167List of MAC III Components 167Connections 168Hardware and S

MAC III Mode 11Agilent 5500 SPM User’s Guide 167Not only is this arrangement very time efficient, it also ensures that the data is extremely reliable

MAC III Mode 11Agilent 5500 SPM User’s Guide 168Please contact Agilent if any of these items are missing.ConnectionsThe MAC III controller is shown in

MAC III Mode 11Agilent 5500 SPM User’s Guide 169In addition to the standard cabling for your microscope, the following connections must be made to use

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 17Overview of Agilent SPM System The main component of the Agilent 5500 SPM system is

MAC III Mode 11Agilent 5500 SPM User’s Guide 170cable between the MICROSCOPE connector on the HEB and the 44-pin connector on the microscope base.AFM

MAC III Mode 11Agilent 5500 SPM User’s Guide 171summed in to any or all of the drives by using Sum External Drive on the Lock-in tab of the Advanced A

MAC III Mode 11Agilent 5500 SPM User’s Guide 172automatically adjust parameters to appropriate values. The changes will also be visible in the Advance

MAC III Mode 11Agilent 5500 SPM User’s Guide 173The following parameters are available in the ACAFM Controls window:Amplitude Displays the amplitude,

MAC III Mode 11Agilent 5500 SPM User’s Guide 174alignment procedure the Pass Through boxes will be selected to allow the correct signals to pass throu

MAC III Mode 11Agilent 5500 SPM User’s Guide 175Amplitude Displays the amplitude, in volts, of cantilever lateral oscillation amplitude.Drive (%) The

MAC III Mode 11Agilent 5500 SPM User’s Guide 176cantilever modulation that results from this applied signal is monitored as a measure of the sample’s

MAC III Mode 11Agilent 5500 SPM User’s Guide 17710 V, beyond which the signal will be clipped. The default value is x1 (the amplitude times 1).Drive M

MAC III Mode 11Agilent 5500 SPM User’s Guide 178Choose Mode > EFM to open the EFM Controls window:Figure 120 EFM Controls windowThe Main tab includ

MAC III Mode 11Agilent 5500 SPM User’s Guide 17910 V, beyond which the signal will be clipped. The default value is x1 (the amplitude times 1).Zero Ph

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 18SPM BasicsScanning Probe Microscopy (SPM) is a large and growing collection of techn

MAC III Mode 11Agilent 5500 SPM User’s Guide 180Optimize Phase shifts the phase signal to maximize the X Component 2 (i.e., to maximize contrast).X Co

MAC III Mode 11Agilent 5500 SPM User’s Guide 181The Main tab shows settings for Lock-in 1 and Q-Control:Amplitude Displays the amplitude, in volts, of

MAC III Mode 11Agilent 5500 SPM User’s Guide 182mechanical response provided by Lock-in 1 and to see if there are any other resonances present. To do

MAC III Mode 11Agilent 5500 SPM User’s Guide 183AC Mode window includes several tabs, each of which is described below.Lock-In TabsEach of the three l

MAC III Mode 11Agilent 5500 SPM User’s Guide 184an amplitude exceeding 10 V, beyond which the signal will be clipped. The default value is x1 (the amp

MAC III Mode 11Agilent 5500 SPM User’s Guide 185respect to the drive signal (they will remain orthogonal to each other). This feature is useful, for e

MAC III Mode 11Agilent 5500 SPM User’s Guide 186Drive Out Routes the output from one of the three lock-in signals to the circuit controlling oscillati

MAC III Mode 11Agilent 5500 SPM User’s Guide 187the box to replace the Ref Set value with the lock-in signal. Select Sum plus GND to pass the Ref Set

MAC III Mode 11Agilent 5500 SPM User’s Guide 188Other TabThe Other tab includes additional parameters that control MAC III operation: Figure 124 Advan

MAC III Mode 11Agilent 5500 SPM User’s Guide 189the Q Control feedback loop. By default, Q Control is turned Off.Drive (%) Sets the amplitude of the Q

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 19collection of data points is then synthesized into the “SPM image,” a 3-dimensional

190Agilent 5500 SPMUser’s GuideAgilent Technologies12Liquid CellLiquid Cell with Standard Sample Plate 191Liquid Cell with MAC Mode 193Flow-Thro

Liquid Cell 12Agilent 5500 SPM User’s Guide 191container; therefore, the sample must be large enough for the O-ring to seat.Figure 125 Liquid cell com

Liquid Cell 12Agilent 5500 SPM User’s Guide 192sample are almost touching (i.e., both the tip and sample are close to focus).4 In PicoView, click the

Liquid Cell 12Agilent 5500 SPM User’s Guide 19317Because of the large movements involved in placing and aligning the liquid cell, you will likely need

194Agilent 5500 SPMUser’s GuideAgilent Technologies13Temperature ControlCantilevers for Temperature Controlled Imaging 194High Temperature Sample P

Temperature Control 13Agilent 5500 SPM User’s Guide 195due to the difference in thermal expansion of the coated and uncoated sides. The bending may ad

Temperature Control 13Agilent 5500 SPM User’s Guide 196The Lakeshore 332 Temperature Controller (Figure 129) drives the high temperature plates.Figure

Temperature Control 13Agilent 5500 SPM User’s Guide 197ConnectionsFigure 130 shows the three cables included with both high temperature sample plates:

Temperature Control 13Agilent 5500 SPM User’s Guide 198connector parallel to the cable and pass it through a port in the chamber. Then screw the round

Temperature Control 13Agilent 5500 SPM User’s Guide 199Figure 132 Hot sample plate wiring diagramFigure 133 Hot MAC sample plate wiring diagram

Notices© Agilent Technologies, Inc. 2008No part of this manual may be reproduced in any form or by any means (including electronic storage and retriev

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 20SPM TechniquesScanning Tunneling Microscopy (STM) The earliest, widely-adopted SPM t

Temperature Control 13Agilent 5500 SPM User’s Guide 200Note that Cable 3 includes a tab on the black-wire side of the connector (Figure 134). The tab

Temperature Control 13Agilent 5500 SPM User’s Guide 2019Press the Heater Range button and select Low, Medium or High.10 Press the Setpoint button and

Temperature Control 13Agilent 5500 SPM User’s Guide 202Peltier (Cold MAC) Sample PlateThe Peltier Cold MAC sample plate lets you image in contact, AAC

Temperature Control 13Agilent 5500 SPM User’s Guide 203The Lakeshore 332 Temperature Controller (Figure 129) is also used with the Peltier plate. The

Temperature Control 13Agilent 5500 SPM User’s Guide 204ConnectionsFigure 137 shows the three cables included with the Peltier sample plate:Figure 137

Temperature Control 13Agilent 5500 SPM User’s Guide 205Figure 139 shows the required wiring for the Peltier sample plate. The connection at the end of

Temperature Control 13Agilent 5500 SPM User’s Guide 206Note that Cable 3 includes a tab on the black-wire side of the connector (Figure 140). The tab

Temperature Control 13Agilent 5500 SPM User’s Guide 207Figure 141 Gravity-fed water cooling system for Peltier sample plate.Imaging1 Set up the micros

Temperature Control 13Agilent 5500 SPM User’s Guide 20811On the Lakeshore controller press Heater Range and select Low.12 Press the Setpoint button an

209Agilent 5500 SPMUser’s GuideAgilent Technologies14Environmental ControlEnvironmental Chamber 209Glove Box 212In addition to the vibration iso

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 21topography. Because the feedback response requires time, constant current mode is ty

Environmental Control 14Agilent 5500 SPM User’s Guide 210atmospheric pressure and is not intended to provide a vacuum or high pressure environment.Fig

Environmental Control 14Agilent 5500 SPM User’s Guide 211microscope base will fit into grooves in the environmental chamber base.5 Swing the microscop

Environmental Control 14Agilent 5500 SPM User’s Guide 212environmental chamber through a hole in the side of the vibration chamber.Glove BoxThe glove

213Agilent 5500 SPMUser’s GuideAgilent Technologies15ElectrochemistryEquipment 216Liquid Cell 216Electrodes 216Working Electrode and Pogo Ele

Electrochemistry 15Agilent 5500 SPM User’s Guide 214electrochemistry experiments can be conducted using either AFM Modes or STM Mode.NOTEAs of the wri

Electrochemistry 15Agilent 5500 SPM User’s Guide 215Figure 145 Electrochemistry experiment schematicFigure 146 Electrochemistry experimental setup usi

Electrochemistry 15Agilent 5500 SPM User’s Guide 216EquipmentThe equipment needed to perform electrochemistry experiments can be as simple as a liquid

Electrochemistry 15Agilent 5500 SPM User’s Guide 217Reference ElectrodeThe reference electrode (RE) should have a diameter of 0.51 mm (0.02 in). It wi

Electrochemistry 15Agilent 5500 SPM User’s Guide 218CleaningThorough cleaning of all components will greatly improve the results of electrochemistry e

Electrochemistry 15Agilent 5500 SPM User’s Guide 219Electrode CleaningElectrodes should be carefully cleaned prior to assembling the liquid cell. This

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 22detector. As the cantilever bends, the position of the laser spot changes. The resul

Electrochemistry 15Agilent 5500 SPM User’s Guide 2208Insert the counter and reference electrodes into the sample plate block (Figure 146). Push the sp

Electrochemistry 15Agilent 5500 SPM User’s Guide 221operational amplifier, but the tip itself is not connected physically to ground.2 In AFM Mode the

Electrochemistry 15Agilent 5500 SPM User’s Guide 222bias, probe potential and sample potential. Any one of these potentials can be swept during cyclic

223Agilent 5500 SPMUser’s GuideAgilent TechnologiesAppendix AWiring DiagramsAgilent 5500 SPM Standard Wiring Diagram 224Agilent 5500 SPM with MAC M

224 Agilent 5500 SPM User’s GuideA Wiring DiagramsAgilent 5500 SPM Standard Wiring DiagramFigure 150 Wiring diagram for Agilent 5500 standard configur

225 Agilent 5500 SPM User’s GuideA Wiring DiagramsAgilent 5500 SPM with MAC Mode ControllerFigure 151 Wiring diagram for Agilent 5500 SPM with MAC Mod

226 Agilent 5500 SPM User’s GuideA Wiring DiagramsAgilent 5500 SPM with MAC Mode, Force Modulation ImagingFigure 152 Wiring diagram for Agilent 5500 S

227 Agilent 5500 SPM User’s GuideA Wiring DiagramsAgilent 5500 SPM with MAC III OptionFigure 153 Wiring diagram for Agilent 5500 SPM with MAC III Opti

228 Agilent 5500 SPM User’s GuideA Wiring DiagramsAgilent 5500 SPM with MAC III Option and Closed Loop ScannerFigure 154 Wiring diagram for Agilent 55

IndexAgilent 5500 SPM User’s Guide 229IndexAAAC Mode, 103, 130AC Mode, 24, 103, 113Acoustic, 25, 103, 104, 130Constant height, 109Magnetic, 26, 1

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 23described below, can be generally described by their function within these three dom

IndexAgilent 5500 SPM User’s Guide 230GGains, 96, 108, 154Optimizing, 101Glove box, 212, 219HHead Electronics Box, 81, 93, 124, 162, 167, 221HEB,

IndexAgilent 5500 SPM User’s Guide 231Reference electrode, 217, 220RequirementsAcoustic noise, 56Resolution, 97Retrace, 141, 144SSample plate, 21

Agilent Technologies5500 SPM User’s GuidePart Number N9410-90001© Agilent Technologies, Inc. 2008

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 24tip makes gentle contact with the sample, exerting from ~0.1-1000 nN force on the sa

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 25components.The complex tip-sample forces cause changes in the amplitude, phase and r

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 26amplitude—this reduction is used as a feedback signal to maintain constant amplitude

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 27Figure 8 Magnetic AC mode (MAC mode)Top MAC ModeIn standard MAC Mode the magnetic co

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 28between the conducting cantilever and sample, a current is generated which is used t

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 29Lateral Force Microscopy (LFM)Lateral Force Microscopy (LFM) is a derivative of Cont

Read This FirstN9410-90001 Agilent 5500 SPM User’s Guide 3Read This First Warranty Agilent warrants Agilent hardware, accessories and supplies against

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 30cantilever due to interatomic magnetic force that persists for greater tip-sample se

Introduction to the Agilent 5500 1Agilent 5500 SPM User’s Guide 31provides a quantitative analysis of changes in the applied or intrinsic electrostati

32Agilent 5500 SPMUser’s GuideAgilent Technologies2Agilent 5500 SPM ComponentsMicroscope 34Probes 35Nose Assembly 36One-Piece Nose Assemblies

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 33The major components for the Agilent 5500 SPM are shown in Figure 10.Figure 10 Components

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 34MicroscopeThe microscope (Figure 11) includes the hinged support stand, coarse z-axis mot

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 35ProbesThe SPM techniques described in Chapter 1, “Introduction to the Agilent 5500,” are

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 36Nose AssemblyThe nose assembly retains the cantilever and enables its motion. A spring cl

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 37damage to the scanner during installation of the nose assembly. Currently the two-piece n

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 38ScannerThe Agilent 5500 is a tip-scanning system, in which the cantilever sits on a scann

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 39• The large multi-purpose scanner includes four piezo elements for X and Y and provides s

Read This FirstN9410-90001 Agilent 5500 SPM User’s Guide 4Specifications Environmental ConditionsTemperature (Operating): 5 to 40 °C Temperature (Non-

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 40DetectorThe photodiode detector receives the reflection of the laser spot off the back of

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 41Sample PlatesThe Agilent 5500 SPM is designed to allow scanning from above the sample. A

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 42The microscope stand is equipped with three magnetic posts from which a sample plate is m

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 43Video SystemThe video system lets you locate regions of interest and align the laser on t

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 44Head Electronics Box (HEB)The Head Electronics Box (HEB) (Figure 20) reads the signals fr

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 45AFM ControllerThe AFM Controller (Figure 22) provides the high voltage to the piezoes and

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 46Vibration Isolation ChamberThe isolation chamber (Figure 23) isolates the 5500 SPM from v

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 47SoftwareThe Agilent 5500 SPM includes PicoView, a powerful software package for controlli

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 48System OptionsMany options are available for the Agilent 5500 SPM. As discussed above, pr

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 49MAC III ModeMAC III Mode provides the benefits of regular MAC mode, provides three lock-i

Read This FirstN9410-90001 Agilent 5500 SPM User’s Guide 5logotype (shown below). DO NOT stare directly into the laser beam. To ensure safe operation,

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 50Temperature ControlThis option includes low and/or high temperature sample plates, a temp

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 51environment, it is possible to perform experiments under very reactive conditions without

Agilent 5500 SPM Components 2Agilent 5500 SPM User’s Guide 52dynamic properties of biological systems by imaging patterns of molecular binding and adh

53Agilent 5500 SPMUser’s GuideAgilent Technologies3Setting Up the Agilent 5500 SPMComponent and Facility Dimensions 53Facility Requirements 55Ut

Setting Up the Agilent 5500 SPM 3Agilent 5500 SPM User’s Guide 54• MAC III Controller: 254 mm W x 127 mm H x 254 mm D (10 in W x 5 in H x 10 in D)• Vi

Setting Up the Agilent 5500 SPM 3Agilent 5500 SPM User’s Guide 55Facility Requirements Following these guidelines for preparing the Agilent 5500 SPM f

Setting Up the Agilent 5500 SPM 3Agilent 5500 SPM User’s Guide 56Utilities The following table summarizes the utility requirements for the Agilent 550

Setting Up the Agilent 5500 SPM 3Agilent 5500 SPM User’s Guide 57acoustic noise should be less than 75 dBc (Criterion C). Use of the vibration isolati

Setting Up the Agilent 5500 SPM 3Agilent 5500 SPM User’s Guide 58Connecting the ComponentsThe cabling for the standard 5500 SPM is shown in Figure 31.

59Agilent 5500 SPMUser’s GuideAgilent Technologies4Preparing for ImagingSetting Up the Scanner Assembly 59One-Piece Nose Assembly 60Inserting th

Read This FirstN9410-90001 Agilent 5500 SPM User’s Guide 6Piezo Scanner Precautions Piezo scanners are, by nature, very FRAGILE pieces of equipment. T

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 60voltages to opposite piezo elements in the scanner so that one element elongates and the other

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 61scanner mounting fixture (Figure 32). Place the nose assembly in the socket on top of the scann

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 62Removing the One-Piece Nose AssemblyA removal tool is included with your system to limit damagi

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 635Once the nose assembly is clear of the scanner you can remove it from the tool.Figure 35 Using

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 64Figure 36 Do not use tweezers to remove a nose assembly. Doing so can place damaging lateral fo

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 65Figure 38 Probe properly situated on AFM nose assemblyAFM probe tips are extremely delicate and

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 66Figure 39 Holding the tweezers as shown, remove a probe from the protective case5 With your fre

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 67Two-Piece Nose AssemblyThe two-piece nose assembly was designed to simplify the process of inse

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 68page 60). Place the body in the socket on top of the scanner, aligning its contact pins.Applyin

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 69Inserting a Probe in the Two-Piece Nose AssemblyAFM probe tips are extremely delicate and can b

Read This FirstN9410-90001 Agilent 5500 SPM User’s Guide 7Technologies, Inc. Furthermore, Agilent Technologies, Inc. assumes no responsibility or liab

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 70Figure 44 Move the lever to open the nose assembly disk.4 Place the probe under the copper-colo

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 71Figure 45 Placing scanner assembly into microscope3 Finger-tighten the knob on the right side o

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 72Aligning the LaserThe next step is to ensure that the scanner’s laser spot is aligned to reflec

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 73cantilever tip (counterclockwise) or away from it. The left-to-right knob adjusts the lateral p

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 74Figure 48 Steps to aligning laser on cantilever beam tip4 Rotate the front-to-back knob counter

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 75The process is similar for triangular-shaped cantilevers, with the exception that the laser wil

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 76back to the center of its travel in both directions. Doing so should make the laser spot reappe

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 77Figure 52 shows how the position of the laser on the cantilever affects the position of the las

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 78Note that the IR sensor card should be used for coarse positioning of the laser if using the 98

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 79Inserting and Aligning the DetectorAs mentioned earlier, the photodiode detector records change

Read This FirstN9410-90001 Agilent 5500 SPM User’s Guide 8Declaration of Conformity DECLARATION OF CONFORMITY According to ISO/IEC Guide 22 and CEN/CE

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 80microscope base. You can install the detector into the scanner before or after installing the s

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 81The Friction signal is the difference between the left and right halves divided by the Sum. Fig

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 823For Contact Mode, The dotted yellow line shows the recommended vertical alignment of the laser

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 83Mounting the SampleThe Agilent 5500 SPM accepts a wide variety of sample plates, including spec

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 84Figure 58 Mounting a sample plate.3 Place the second alignment tab over the alignment pin as in

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 854Let the magnets on the three posts gently engage the sample plate to hold it in place, as in i

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 86Using the Video SystemThe Agilent 5500 SPM includes a USB-based video system for viewing the ti

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 87The z-position knob (Figure 60) lets you raise and lower the video system optics. Typically the

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 88clockwise to move the field-of-view to the right, and counterclockwise to move left.Figure 61 A

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 89Choose Controls > CameraView to view the video output from the camera (Figure 63).Figure 63

Read This FirstN9410-90001 Agilent 5500 SPM User’s Guide 9Contact Information Agilent Technologies, Inc.4330 W. Chandler Blvd., Chandler, Arizona 8522

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 90Care and Handling of the Probes and ScannerProbesAlways store probes at room temperature in the

Preparing for Imaging 4Agilent 5500 SPM User’s Guide 91to excessive humidity, temperature changes or contact. Agilent recommends that scanners be stor

92Agilent 5500 SPMUser’s GuideAgilent Technologies5Contact Mode ImagingSetting Up for Contact Mode Imaging 93Constant Force Mode 93Constant Heig

Contact Mode Imaging 5Agilent 5500 SPM User’s Guide 93Setting Up for Contact Mode ImagingContact Mode imaging can be completed with any of the multi-p

Contact Mode Imaging 5Agilent 5500 SPM User’s Guide 94Figure 64 Tip in focus through video systemb Lower the focal plane just slightly below the tip b

Contact Mode Imaging 5Agilent 5500 SPM User’s Guide 9511Locate the area of interest on the sample by manually moving the X/Y stage control micrometers

Contact Mode Imaging 5Agilent 5500 SPM User’s Guide 96Figure 67 Servo window showing Setpoint voltage and Gains13 Click the Approach button in PicoVie

Contact Mode Imaging 5Agilent 5500 SPM User’s Guide 97changes in tip deflection in order to maintain constant force. 10 % is a good starting value; mo

Contact Mode Imaging 5Agilent 5500 SPM User’s Guide 98buffer frame, then select the Input Signal from the list (Figure 69). The list will vary dependi

Contact Mode Imaging 5Agilent 5500 SPM User’s Guide 99Figure 70 Scan and Motor window after scan has been initiatedAs the tip moves across the first s