4
Agilent 41501B SMU and Pulse Generator Expander
Output terminal/connection:
Dual triaxial connectors, Kelvin (remote
sensing)
Voltage/Current Compliance
(Limiting):
Voltage: 0V to ±200V
Current: ±1pA to ±1A
Compliance Accuracy: Same as the
current (voltage) settling accuracy.
HPSMU Supplemental Information:
Maximum allowable cable resistance
when using Kelvin connection:
Force: 0.7Ω (100mA to 1A)
Force: 10Ω (≤100mA)
Sense: 10Ω
Typical voltage source output
resistance (Force line/non-Kelvin
connection): 0.2Ω
Voltage measurement input resistance/
current source output resistance:
≥10
13
Ω (1nA range)
Current compliance setting accuracy for
opposite polarity:
1nA to 10nA range: V/I setting
accuracy ± 12% of range
HPSMU (High Power SMU) Specifications
Voltage Range, Resolution, and Accuracy
(HPSMU)
50mA
±(0.035%+10mV)200µV±(0.04%+30mV)
10mV
± 200V
125mA
±(0.03%+5mV)100µV±(0.04%+15mV)
5mV
± 100V
500mA
±(0.02%+3mV)40µV
±(0.03%+7mV)2mV
± 40V
1A
±(0.02%+2mV)20µV±(0.03%+4mV)
1mV
± 20V
1A
±(0.02%+700µV)2µV±(0.03%+900µV)100µV± 2V
Max.
Current
Meas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Voltage
Range
*2
±(0.5%+300µA+2µA×Vout)1µA±(0.5%+500µA+2µA×Vout)100µA±1Α
*1
±(0.1%+30µA+200nA×Vout)
100nA
±(0.12%+50µA+200nA×Vout)10µA±100mΑ
200V
±(0.1%+2µA+20nA×Vout)
10nA
±(0.12%+4µA+20nA×Vout)1µA±10mA
200V
±(0.1%+300nA+2nA×Vout)
1nA
±(0.12%+500nA+2nA×Vout)
100nA
±1mA
200V
±(0.1%+20nA+200pA×Vout)
100pA
±(0.12%+40nA+200pA×Vout)
10nA
±1
00µA
200V
±(0.1%+3nA+20pA×Vout)
10pA
±(0.12%+5nA+20pA×Vout)
1nA
±1
0µA
200V
±(0.1%+200pA+2pA×Vout)
1pA
±(0.12%+400pA+2pA×Vout)
100pA
±1µA
200V
±(0.1%+30pA+200fA×Vout)
100fA
±(0.12%+50pA+200fA×Vout)
10pA±100nA
200V
±(0.5%+5pA+20fA×Vout)
10fA
±(0.5%+7pA+20fA×Vout)
1pA±10nA
200V
±(0.5%+3pA+2fA×Vout)
10fA
±(0.5%+3pA+2fA×Vout)
100fA±1nA
Max.
V
Meas.
Accuracy
Meas.
Reso.
Set.
Accuracy
Set.
Reso.
Current
Range
*1: 200V (Iout 50mA), 100V (50mA<Iout≤100mA)
*2: 200V (Iout 50mA), 100V (50mA<Iout≤125mA), 40V (125mA<Iout≤500mA),
20V (500mA<Iout≤1mA)
100nA to 1A range: V/I setting
accuracy ± 2.5% of range
Vout is the output voltage in volts.
Iout is the output current in amps.
Current (mA)
Voltage (V)
1000
50
125
-50
-125
-1000
100-100
-20-40 20 40
HPSMU Measurement
and Output Range
200-200
500
-500
Pulse/DC Output Voltage and Accuracy (PGU)
±(3% of Base + 50mV)
8mV
±40V
±(3% of Base + 50mV)
4mV
±20V
Pulse
±(1% of Base + 50mV +1% of Pulse)
8mV
±40V
±(1% of Base + 50mV +1% of Pulse)
4mV
±20V
Base
Accuracy
*1
ResolutionVoltage
Range
Set
Parameter
Note: DC output is performed by the Base parameter.
*1: Accuracy is specified at leading edge - trailing edge = 1µs
For example, accuracy specifications are
given as ±% of set/measured value (0.1%)
plus offset value (30pA+200fA×Vout) for the
100nA range. The offset value consists of a
fixed part determined by the set/measuremet
range and a proportional part that is
multiplied by Vout.
PGU (Pulse Generator Unit)
Specifications
Modes: Pulse or constant
Amplitude: 0Vpp to 40Vpp
Window: -40.0V to +40.0V
Maximum current:
±200mA (pulse width: ≤1ms, average
current≤100mA)
±100mA
Pulse width: 1.0µs to 9.99s
Minimum resolution: 100ns
Pulse period: 2.0µs to 10.0s
Minimum resolution: 100ns
Delay: 0s to 10s
Minimum resolution: 100ns
Transition time: 100ns to 10ms
Minimum resolution: 1ns
Output impedance: 50Ω or low
impedance (≤1Ω)
Burst count range: 1 - 65535
(48 Seiten)
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