Agilent Technologies B1542A Bedienungsanleitung Seite 15

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Complete measurement coverage from DC to ultra-fast pulsed IV
Agilent’s B1542A Pulsed IV solution allows you to measure gate voltage and drain
current pulses down to 10 ns.
Wide range of pulsed IV
application coverage
The B1500A has two pulsed IV
measurement solutions: the
WGFMU and the B1542A Pulsed
IV option. The WGFMU can cover
a wide range of pulsed IV applica-
tions using its powerful ALWG
and fast IV measurement capa-
bilities. The B1542A solution
provides faster pulsed IV mea-
surement capability, supporting
a 10 ns pulse width (with 2 ns
rise and fall times). This is
important for characterizing SOI
and high-k gate dielectric CMOS
transistors. The B1542A solution
consists of a pulsed IV applica-
tion test library, an Agilent
Digital Storage Oscilloscope and
Pulse Generator, as well as cables
and DC/RF connector modules.
An optional switch module is
also available to enable you to
toggle between DC and pulsed
measurement without having to
change any cables. Both the
WGFMU and B1542A solutions
are completely integrated and
ready to use.
SMUs:
Technology
development
• Process integration
• Incoming inspection
• Failure analysis
• Reliability test
• Device modeling
• NVM cell test
• Nanodevice and
material research
• Quasi-static CV
• Timing on-the-fly
NBTI
WGFMU:
Ultra-fast NBTI
• General pulsed IV
• RTS measurement
• Advanced NVM
(PRAM, ReRAM)
• MEMS capacitor
characterization
• All fast time-domain
measurements
B1542A Pulsed IV:
SOI transistor test
• High-k gate
transistor test
13s
DC
100 ns 10 ns
0.1 fA
1A
100 3s
10 3s1ms
Measurement Range
Minimum Pulsing
Capability
Agilent offers the broadest coverage for parametric
test, spanning the range from highly accurate DC
to fast-pulsed IV measurement.
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