Agilent Technologies B1500A Betriebsanweisung

Keysight Technologies B1500A Semiconductor Device AnalyzerUser’s Guide

Power Supply and Measurement Safety•Power Supply SafetyThis instrument can output high currents and voltages. Make sure that the load or device under

3- 22 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesTo install 16495K Fix your necessary 16495 connector plates to the shi

Keysight B1500A User’s Guide, Ed ition 14 3- 23InstallationInstalling AccessoriesTo connect SCUU/GSWU 1To attach the SCUU to the B1500A:1. Attach the

3- 24 Keysight B1500A User’s Guide, Edition 14InstallationInstalling Accessories2. Fix the SCUU inside or outside the shielding box. The SCUU must be

Keysight B1500A User’s Guide, Ed ition 14 3- 25InstallationInstalling AccessoriesTo Connect GNDU AdapterThe ground unit (GNDU) output is the single tr

3- 26 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesTo Connect MCSMU Connection BoxKeysight N1255A connection box is used

Keysight B1500A User’s Guide, Ed ition 14 3- 27InstallationInstalling AccessoriesFigure 3-9 N1255A Internal Connections• SW1: Kelvin/Non-Kelvin select

3- 28 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesNOTESeries Resistor and Shunt ResistorThe series resistor and the shun

Keysight B1500A User’s Guide, Ed ition 14 3- 29InstallationMounting ConnectorsMounting Connectors Previous sections described how to install the avail

3- 30 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsTable 3-5 Recommended Parts Table 3-6 Dimensions of Connector Holes Usage

Keysight B1500A User’s Guide, Ed ition 14 3- 31InstallationMounting ConnectorsTo Make an Interlock Circuit The interlock circuit is designed to preve

• Source/Monitor TerminalsSource/monitor unit, SMU, can simultaneously perform DC voltage or current output and measurement. Typical SMU has the Forc

3- 32 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsInstalling the interlock circuitInstall the interlock circuit as follows:

Keysight B1500A User’s Guide, Ed ition 14 3- 33InstallationMounting ConnectorsFigure 3-13 Dimensions of the Interlock Switch (N1254A-402) Figure 3-14

3- 34 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsTo Connect GNDU Output The GNDU output connection examples are shown in T

Keysight B1500A User’s Guide, Ed ition 14 3- 35InstallationMounting ConnectorsTo Connect SMU Output The SMU output connection examples are shown in Ta

3- 36 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsTable 3-8 SMU Output ConnectionsNOTETo Minimize Leakage CurrentFor the hi

Keysight B1500A User’s Guide, Ed ition 14 3- 37InstallationMounting ConnectorsFigure 3-16 ASU Output Kelvin Connection (Remote Sensing)The ASU inputs

3- 38 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsFigure 3-17 ASU Output non-Kelvin ConnectionThe ASU inputs can be connect

Keysight B1500A User’s Guide, Ed ition 14 3- 39InstallationMounting ConnectorsFigure 3-18 SCUU Output Kelvin Connection (Remote Sensing)The SCUU shoul

3- 40 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsFigure 3-19 SCUU Output non-Kelvin ConnectionThe SCUU should be connected

Keysight B1500A User’s Guide, Ed ition 14 3- 41InstallationMounting ConnectorsTo Connect MCSMU OutputThe MCSMU output connection example is shown in F

High Voltage Shock HazardKeysight B1500A can force dangerous voltages (±200 V for HPSMU and ±100 V for MPSMU/HRSMU) at the Force, Guard, and Sense ter

3- 42 Keysight B1500A User’s Guide, Edition 14InstallationMounting ConnectorsTo Connect MFCMU OutputThe MFCMU output connection example is shown in Fi

Keysight B1500A User’s Guide, Ed ition 14 3- 43InstallationConnecting Measurement DevicesConnecting Measurement DevicesThis section describes how to c

3- 44 Keysight B1500A User’s Guide, Edition 14InstallationConnecting Measurement DevicesUsing Test Fixture1. Press the Stop key to set the output off.

Keysight B1500A User’s Guide, Ed ition 14 3- 45InstallationConnecting Measurement DevicesConnections for High Current MeasurementsWhen you force or me

3- 46 Keysight B1500A User’s Guide, Edition 14InstallationConnecting Measurement DevicesUsing Connector PlateThis section provides the information use

Keysight B1500A User’s Guide, Ed ition 14 3- 47InstallationConnecting Measurement DevicesWARNING To prevent electrical shock and DUT damage, do not co

3- 48 Keysight B1500A User’s Guide, Edition 14InstallationConnecting Measurement DevicesTo Measure Low ResistanceWhen you measure a low resistance, hi

Keysight B1500A User’s Guide, Ed ition 14 3- 49InstallationConnecting Measurement DevicesWARNING To prevent electrical shock and DUT damage, do not co

3- 50 Keysight B1500A User’s Guide, Edition 14InstallationCapacitance Compensation When Using Switching MatrixCapacitance Compensation When Using Swit

Keysight B1500A User’s Guide, Ed ition 14 3- 51InstallationCapacitance Compensation When Using Switching MatrixRequired ConditionsThe following condit

Gefahr durch HochspannungVon den Geräten Keysight B1500A können Spannungen an den Anschlüssen “Force”, “Guard” und “Sense” von bis zu 200 V ausgehen.

3- 52 Keysight B1500A User’s Guide, Edition 14InstallationCapacitance Compensation When Using Switching MatrixIn Figure 3-22, C1 (DATA04), C2H (DATA05

Keysight B1500A User’s Guide, Ed ition 14 3- 53InstallationCapacitance Compensation When Using Switching MatrixTo Create Compensation Data FileThis se

3- 54 Keysight B1500A User’s Guide, Edition 14InstallationCapacitance Compensation When Using Switching Matrix• For E5250A:The lines DATA05 to DATA08

Keysight B1500A User’s Guide, Ed ition 14 3- 55InstallationCapacitance Compensation When Using Switching Matrix2. Measure the R, L, C values of the fo

3- 56 Keysight B1500A User’s Guide, Edition 14InstallationCapacitance Compensation When Using Switching MatrixTo obtain compensation coefficientsObtai

Keysight B1500A User’s Guide, Ed ition 14 3- 57InstallationCapacitance Compensation When Using Switching MatrixTable 3-11 Template Compensation Data F

3- 58 Keysight B1500A User’s Guide, Edition 14InstallationMaintenanceMaintenanceMaintenance should be performed periodically to keep the instrument in

Keysight B1500A User’s Guide, Ed ition 14 3- 59InstallationAbout Plug-in ModulesAbout Plug-in ModulesThis section describes the following notices abou

3- 60 Keysight B1500A User’s Guide, Edition 14InstallationAbout Plug-in ModulesTo Interconnect SPGUsIf multiple SPGUs have been installed, connect the

Keysight B1500A User’s Guide, Ed ition 14 3- 61InstallationAbout Plug-in ModulesTo Interconnect WGFMUsIf multiple WGFMUs have been installed, connect

Danger de choc dû à une haute tensionUne tension dangereuse (max. ± pour HPSMU; 200 Vdc, max. ± pour MPSMU/ HRSMU; 100 Vdc) émanant du dispositif Key

3- 62 Keysight B1500A User’s Guide, Edition 14InstallationAbout Plug-in ModulesAbout Module InstallationModule installation must be carried out at a K

4 Specifications

4- 2 Keysight B1500A User’s Guide, Edition 14SpecificationsThis chapter describes the specifications and supplemental characteristics for Keysight B15

Keysight B1500A User’s Guide, Ed ition 14 4- 3SpecificationsHardwareHardwareSpecification ConditionsThe measurement and output accuracy are specified

4- 4 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareSupported Plug-in ModulesThe B1500A supports ten slots for the following plug-in mo

Keysight B1500A User’s Guide, Ed ition 14 4- 5SpecificationsHardware• Spot, sweep, and more measurement capabilities• Sampling (time domain) measureme

4- 6 Keysight B1500A User’s Guide, Edition 14SpecificationsHardware• Ultra-fast IV measurement capability for the pulsed IV and transient IV such as N

Keysight B1500A User’s Guide, Ed ition 14 4- 7SpecificationsHardwareGround Unit (GNDU)The GNDU is furnished standard with the mainframe.• Output volta

4- 8 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareMPSMU/HRSMUMPSMU: Medium Power Source/Monitor UnitHRSMU: High Resolution Source/Mon

Keysight B1500A User’s Guide, Ed ition 14 4- 9SpecificationsHardwareTable 4-1 Voltage range, resolution, and accuracy (high resolution ADC)Table 4-2 C

高電圧感電注意Keysight B1500A の Force、Guard、Sense 端子には、危険電圧が出力されることがあります（HPSMU の場合は最大 ±200 Vdc、MPSMU/HRSMU の場合は最大 ±100 Vdc）。感電事故防止のため、必ず以下の事柄を守ってください。•3 極電源

4- 10 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-3 Voltage range, resolution, and accuracy (high speed ADC)Table 4-4 Curren

Keysight B1500A User’s Guide, Ed ition 14 4- 11SpecificationsHardwareASUASU: Atto Sense and Switch Unit• Maximum voltage, AUX path100 V (AUX input to

4- 12 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareHPSMUHPSMU: High Power Source/Monitor Unit• Voltage range, resolution, and accurac

Keysight B1500A User’s Guide, Ed ition 14 4- 13SpecificationsHardwareTable 4-5 Voltage range, resolution, and accuracy (high resolution ADC)Table 4-6

4- 14 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-7 Voltage range, resolution, and accuracy (high speed ADC)Table 4-8 Curren

Keysight B1500A User’s Guide, Ed ition 14 4- 15SpecificationsHardwareMCSMUMedium Current Source/Monitor Unit• Voltage range, resolution, and accuracyS

4- 16 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-9 MCSMU voltage range, resolution, and accuracyTable 4-10 MCSMU current ra

Keysight B1500A User’s Guide, Ed ition 14 4- 17SpecificationsHardwareSMU Common Specifications• Output terminal/connectionDual triaxial connector, Kel

4- 18 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareFor MCSMU• Width: 10 s to 100 ms (1 A range), 10 s to 2 s (10 A to 100 mA range

Keysight B1500A User’s Guide, Ed ition 14 4- 19SpecificationsHardwareSMU Supplemental Characteristics• Current compliance setting accuracy (for opposi

Product Stewardship• Waste Electrical and Electronic Equipment (WEEE) Directive 2002/96/ECThis product complies with the WEEE Directive (2002/96/EC) m

4- 20 Keysight B1500A User’s Guide, Edition 14SpecificationsHardware• Maximum allowable cable resistance (Kelvin connection)For HPSMU, MPSMU, HRSMU: 1

Keysight B1500A User’s Guide, Ed ition 14 4- 21SpecificationsHardware• Overshoot (filter ON)For HPSMU, MPSMU, HRSMUVoltage source: 0.03 % of V rangeCu

4- 22 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareMFCMUMFCMU: Multi Frequency Capacitance Measurement Unit• Measurement functions• M

Keysight B1500A User’s Guide, Ed ition 14 4- 23SpecificationsHardware• DC bias function•DC biasRange: 0 to ± 25 VResolution: 1 mVAccuracy: ± (0.5 % +

4- 24 Keysight B1500A User’s Guide, Edition 14SpecificationsHardware• Measurement accuracyMeasurement accuracy at the measurement port of the MFCMU or

Keysight B1500A User’s Guide, Ed ition 14 4- 25SpecificationsHardwareTable 4-11 Parameters EPOSC, ZOSCVosc is oscillator level in mV.Table 4-12 Parame

4- 26 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-14 Example of calculated C/G measurement accuracyFrequencyMeasured Capacit

Keysight B1500A User’s Guide, Ed ition 14 4- 27SpecificationsHardwareSCUU/GSWUSCUU: SMU CMU Unify UnitGSWU: Guard Switch UnitThe SCUU multiplexes the

4- 28 Keysight B1500A User’s Guide, Edition 14SpecificationsHardware• SCUU supplemental characteristics•SMU pathOffset current: < 20 fAOffset volta

Keysight B1500A User’s Guide, Ed ition 14 4- 29SpecificationsHardwareAdditional errors (for SMU voltage output accuracy): ± 100 V (open load)• DC bia

Precautionary StatementKeysight B1500A Semiconductor Device Analyzer operates in the Microsoft Windows environment. Keysight B1500A requires Keysight

4- 30 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareHV-SPGUHV-SPGU: High Voltage Semiconductor Pulse Generator Unit• Number of output

Keysight B1500A User’s Guide, Ed ition 14 4- 31SpecificationsHardwareTable 4-15 Pulse range and pulse parameterItemValue aa. Unless otherwise stated,

4- 32 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-16 Pulse/DC output voltage and accuracy• ALWG (arbitrary linear waveform g

Keysight B1500A User’s Guide, Ed ition 14 4- 33SpecificationsHardware• Programmable timing range: 10 ns to 671.088630 ms, 10 ns resolution• SPGU suppl

4- 34 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareSelectorKeysight 16440A (B1500A-A04) SMU/pulse generator selector switches either

Keysight B1500A User’s Guide, Ed ition 14 4- 35SpecificationsHardwareWGFMU/RSUWGFMU: Waveform Generator/Fast Measurement UnitRSU: Remote-sense and Swi

4- 36 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareThe V Monitor terminal outputs a buffered signal equal to 1/10 of the Output termi

Keysight B1500A User’s Guide, Ed ition 14 4- 37SpecificationsHardware• WGFMU supplemental data•RSU SMU pathLeakage current: < 100 pAResidual resist

4- 38 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-18 Voltage force accuracy, resolution, and timingV force (Fast IV mode) -5

Keysight B1500A User’s Guide, Ed ition 14 4- 39SpecificationsHardwareTable 4-19 Voltage measurement accuracy, resolution, and noiseTable 4-20 Current

Working in ComfortTo optimize your comfort and productivity, it is important that you set up your work area correctly and use your instrument properly

4- 40 Keysight B1500A User’s Guide, Edition 14SpecificationsHardwareTable 4-22 Minimum timing parameters for current measurement1Voltage applied to DU

Keysight B1500A User’s Guide, Ed ition 14 4- 41SpecificationsHardwareTable 4-23 Minimum timing parameters for voltage measurement1Voltage applied to D

4- 42 Keysight B1500A User’s Guide, Edition 14SpecificationsEasyEXPERT SoftwareEasyEXPERT SoftwareOperation mode• Application test modeRealizes applic

Keysight B1500A User’s Guide, Ed ition 14 4- 43SpecificationsEasyEXPERT SoftwareOscilloscope viewAvailable for the tracer test using MCSMU modules. Th

4- 44 Keysight B1500A User’s Guide, Edition 14SpecificationsEasyEXPERT SoftwareMeasurement modesSupports the following measurement modes.• IV measurem

Keysight B1500A User’s Guide, Ed ition 14 4- 45SpecificationsEasyEXPERT SoftwareStep delay time: 0 to 1 s, 100 s resolutionStep output trigger delay

4- 46 Keysight B1500A User’s Guide, Edition 14SpecificationsEasyEXPERT Software• Current offset cancelThis function subtracts the offset current from

Keysight B1500A User’s Guide, Ed ition 14 4- 47SpecificationsEasyEXPERT SoftwareAutomatic analysis functionOn a graphics plot, the markers and lines c

4- 48 Keysight B1500A User’s Guide, Edition 14SpecificationsEasyEXPERT SoftwareWorkspace and data management• WorkspaceSeparate work environment for E

Keysight B1500A User’s Guide, Ed ition 14 4- 49SpecificationsProgram and interface capabilitiesProgram and interface capabilities• Data storageHard di

• Maintaining static posture for prolonged periods.• Failing to take frequent short breaks.• Other environmental and psychosocial factors.In addition

4- 50 Keysight B1500A User’s Guide, Edition 14SpecificationsDesktop EasyEXPERT SoftwareNOTE For the latest system requirements, go to www.keysight.com

Keysight B1500A User’s Guide, Ed ition 14 4- 51SpecificationsGeneral SpecificationsGeneral Specifications• Temperature rangeOperating: +5 C to +40 C

4- 52 Keysight B1500A User’s Guide, Edition 14SpecificationsGeneral Specifications16440A Selector: 250 mm (W)  50 mm (H)  275 mm (D)16445A Selector

5 Accessories and Options

5- 2 Keysight B1500A User’s Guide, Edition 14Accessories and OptionsFurnished accessories, available accessories, and available options of Keysight B1

Keysight B1500A User’s Guide, Ed ition 14 5- 3Accessories and OptionsTable 5-2 OptionsOption Item Description B1500A-015 1.5 m length of bundled cabl

5- 4 Keysight B1500A User’s Guide, Edition 14Accessories and OptionsTable 5-3 B1500A-A04 Basic Flash Memory Cell PackageTable 5-4 B1500A-A311 WGFMU Ad

Keysight B1500A User’s Guide, Ed ition 14 5- 5Accessories and OptionsTable 5-5 B1500A-A3P WGFMU Probe Cable KitTable 5-6 B1500A-A5F1 Test Fixture for

5- 6 Keysight B1500A User’s Guide, Edition 14Accessories and OptionsTable 5-7 Available AccessoriesModel Number Option Item Description 16440A SMU/PG

Keysight B1500A User’s Guide, Ed ition 14 5- 7Accessories and Options16445A Selector adapter for 16440A16445A-001 Control cable (B1500 to 16445A), 1.5

Notices© Keysight Technologies 2005-2014No part of this manual may be reproduced in any form or by any means (including elec-tronic storage and retrie

In This Manual This manual describes the product overview and installation information of Keysight Technologies B1500A. This manual consists of the fo

5- 8 Keysight B1500A User’s Guide, Edition 14Accessories and Options16493Q SPGU-SPGU connection cable (SMA to SMA)16493Q-001 8 cm length16493R WGFMU C

Keysight B1500A User’s Guide, Ed ition 14 5- 9Accessories and Options16495F Connector plate w/ 12triax., Interlock, GNDU16495F-001 Bulkhead feedthrou

5- 10 Keysight B1500A User’s Guide, Edition 14Accessories and OptionsE5288A Atto Sense and Switch Unit (ASU)E5288A-001 Add triaxial and D-sub cables,

This information is subject to change without notice. © Keysight Technologies 2005-2014Edition 14, August 2014*B1500-90000*B1500-90000www.keysight.com

ContentsKeysight B1500A User’s Guide, Ed ition 141. Getting StartedTo Turn On/Off B1500A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Keysight B1500A User’s Guide, Edition 14ContentsHPSMU - High Power SMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

ContentsKeysight B1500A User’s Guide, Ed ition 14 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Keysight B1500A User’s Guide, Edition 14ContentsDesktop EasyEXPERT Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1 Getting Started

1- 2 Keysight B1500A User’s Guide, Edition 14Getting StartedThis chapter describes the basic operations of Keysight B1500A. Before learning the produc

Keysight B1500A User’s Guide, Ed ition 14 1- 3Getting StartedTo Turn On/Off B1500ATo Turn On/Off B1500ANOTEWhen turning the B1500A onOpen the measurem

1- 4 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Turn On/Off B1500ATo Turn B1500A On1. Connect the power cable from Keysight B1500A to a

Keysight B1500A User’s Guide, Ed ition 14 1- 5Getting StartedTo Turn On/Off B1500ANOTE Keysight B1500A has the following front panel user interface.•S

1- 6 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Launch EasyEXPERTTo Launch EasyEXPERT1. If the automatic start function is off, the Sta

Keysight B1500A User’s Guide, Ed ition 14 1- 7Getting StartedTo Launch EasyEXPERTIf Only One Workspace ExistsFor the screen as shown in Figure 1-1, pe

1- 8 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Launch EasyEXPERTTo Create WorkspaceFor the screen as shown in Figure 1-2, perform the

Keysight B1500A User’s Guide, Ed ition 14 1- 9Getting StartedTo Launch EasyEXPERTTo Select WorkspaceFor the screen as shown in Figure 1-3, perform the

1- 10 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Use Tracer Test ModeTo Use Tracer Test ModeThe following procedure performs the tracer

Keysight B1500A User’s Guide, Ed ition 14 1- 11Getting StartedTo Use Tracer Test ModeTable 1-3 I/V Trace Measurement SetupFigure 1-4 Display Example o

1- 12 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Use Application Test ModeTo Use Application Test ModeFor the screen as shown in Figure

Keysight B1500A User’s Guide, Ed ition 14 1- 13Getting StartedTo Use Application Test ModeTo enter the value, use the USB keyboard or the screen/numer

1- 14 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Use Classic Test ModeTo Use Classic Test ModeThe following procedure performs the I/V

Keysight B1500A User’s Guide, Ed ition 14 1- 15Getting StartedTo Use Classic Test ModeSee “To Perform Measurement” on page 1-16 to start measurement.T

1- 16 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Perform MeasurementTo Perform Measurement1. Click the Single button (upper right on th

Keysight B1500A User’s Guide, Ed ition 14 1- 17Getting StartedTo Perform MeasurementTo Use Test Result EditorThe Test Result Editor provides the follo

1- 18 Keysight B1500A User’s Guide, Edition 14Getting StartedTo Use Analysis ToolsTo Use Analysis ToolsThe Data Display window provides several analys

2Introduction

2- 2 Keysight B1500A User’s Guide, Ed ition 14IntroductionThis chapter describes the basic functions and features of Keysight B1500A Semiconductor Dev

Keysight B1500A User’s Guide, Ed ition 14 2- 3IntroductionOverviewOverviewKeysight B1500A Semiconductor Device Analyzer is the new generation one box

2- 4 Keysight B1500A User’s Guide, Edition 14IntroductionOverview• Keysight B1500A Semiconductor Device AnalyzerMainframe that provides the ground uni

Keysight B1500A User’s Guide, Ed ition 14 2- 5IntroductionOverview• WGFMU module and RSUWaveform generator/fast measurement unit module and the remote

2- 6 Keysight B1500A User’s Guide, Edition 14IntroductionOverviewKeysight EasyEXPERT SoftwareKeysight EasyEXPERT software is a specially-designed Wind

Keysight B1500A User’s Guide, Ed ition 14 2- 7IntroductionOverviewClassic Test You can perform measurements by using the user interface similar to the

COMPLIANCE WITH GERMAN NOISE REQUIREMENTSThis is to declare that this product is in conformance with the German Regulation on Noise Declaration for M

2- 8 Keysight B1500A User’s Guide, Edition 14IntroductionFront ViewFront ViewThis section describes the front view of Keysight B1500A.1. Standby switc

Keysight B1500A User’s Guide, Ed ition 14 2- 9IntroductionFront View2. HDD access indicatorThis green LED lights in the access status of HDD or DVD dr

2- 10 Keysight B1500A User’s Guide, Edition 14IntroductionFront View10. SoftkeysSeven softkeys are available for Keysight EasyEXPERT environment. Used

Keysight B1500A User’s Guide, Ed ition 14 2- 11IntroductionRear ViewRear ViewThis section describes the rear view of Keysight B1500A.1. Serial numberY

2- 12 Keysight B1500A User’s Guide, Edition 14IntroductionRear View3. LINE input receptacleAC power cable is connected to this receptacle.4. GPIB inte

Keysight B1500A User’s Guide, Ed ition 14 2- 13IntroductionRear View10. USB interfacesUSB, 2 ports. For keyboard, mouse, or peripherals.To remove USB

2- 14 Keysight B1500A User’s Guide, Edition 14IntroductionRear ViewA. GNDU/ADCGround unit and A/D converter module. Always installed in the B1500A.B.

Keysight B1500A User’s Guide, Ed ition 14 2- 15IntroductionRear ViewC. WGFMU moduleThe waveform generator/fast measurement unit (WGFMU) has the Ch 1 a

2- 16 Keysight B1500A User’s Guide, Edition 14IntroductionRear Viewunder test (DUT). Also the Lcur and Lpot have to be connected together at the other

Keysight B1500A User’s Guide, Ed ition 14 2- 17IntroductionMeasurement ModulesMeasurement ModulesKeysight B1500A can be equipped with the following me

Safety SummaryThe following general safety precautions must be observed during all phases of operation, service, and repair of this instrument. Failur

2- 18 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesAbout SMUSource/monitor unit (SMU) can apply DC voltage or current, and c

Keysight B1500A User’s Guide, Ed ition 14 2- 19IntroductionMeasurement ModulesHPSMU - High Power SMUThis section describes typical specification of th

2- 20 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesTable 2-1 HPSMU Output Voltage Ranges and Resolutions Table 2-2 HPSMU Out

Keysight B1500A User’s Guide, Ed ition 14 2- 21IntroductionMeasurement ModulesTable 2-3 HPSMU Measurement Voltage Values and Resolutions Table 2-4 HPS

2- 22 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesMPSMU - Medium Power SMUThis section describes typical specification of t

Keysight B1500A User’s Guide, Ed ition 14 2- 23IntroductionMeasurement ModulesTable 2-5 MPSMU Output Voltage Ranges and Resolutions Table 2-6 MPSMU Ou

2- 24 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesTable 2-7 MPSMU Measurement Voltage Values and Resolutions Table 2-8 MPSM

Keysight B1500A User’s Guide, Ed ition 14 2- 25IntroductionMeasurement ModulesNOTETo connect ASUTo use the ASU, it must be connected to the SMU which

2- 26 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesMCSMU - Medium Current SMUThis section describes typical specification of

Keysight B1500A User’s Guide, Ed ition 14 2- 27IntroductionMeasurement ModulesTable 2-9 MCSMU Voltage Ranges and ResolutionsTable 2-10 MCSMU Current R

• BEFORE APPLYING POWERVerify that all safety precautions are taken. Make all connections to the instrument before applying power. Note the instrumen

2- 28 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesHRSMU - High Resolution SMUThis section describes typical specification o

Keysight B1500A User’s Guide, Ed ition 14 2- 29IntroductionMeasurement ModulesTable 2-11 HRSMU Output Voltage Ranges and Resolutions Table 2-12 HRSMU

2- 30 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesTable 2-13 HRSMU Measurement Voltage Values and Resolutions Table 2-14 HR

Keysight B1500A User’s Guide, Ed ition 14 2- 31IntroductionMeasurement ModulesNOTETo connect ASUTo use the ASU, it must be connected to the SMU which

2- 32 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesMFCMU - Multi Frequency CMUThis section describes typical specification o

Keysight B1500A User’s Guide, Ed ition 14 2- 33IntroductionMeasurement ModulesTable 2-15 Measurement ParametersPrimary Parameter Secondary ParameterR

2- 34 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesTable 2-16 Measurement Range for Fixed Ranging ModeFigure 2-7 Impedance v

Keysight B1500A User’s Guide, Ed ition 14 2- 35IntroductionMeasurement ModulesHVSPGU - High Voltage SPGUThis section describes key specification of th

2- 36 Keysight B1500A User’s Guide, Edition 14IntroductionMeasurement ModulesWGFMU - Waveform Generator/Fast Measurement UnitThis section describes ty

3 Installation

Safety SymbolsThe general definitions of safety symbols used on equipment or in manuals are listed below.Direct current.Alternating current.Earth (gro

3- 2 Keysight B1500A User’s Guide, Edition 14InstallationThis chapter describes how to install Keysight B1500A and accessories.• “Requirements”• “Insp

Keysight B1500A User’s Guide, Ed ition 14 3- 3InstallationWARNING There are potentially hazardous voltages (± 200 V for HPSMU, and ± 100 V for MPSMU/H

3- 4 Keysight B1500A User’s Guide, Edition 14InstallationRequirementsRequirements This section contains information on:• “Power Requirements”• “Operat

Keysight B1500A User’s Guide, Ed ition 14 3- 5InstallationRequirementsInstallation Requirements WARNING Do not operate the instrument in dusty environ

3- 6 Keysight B1500A User’s Guide, Edition 14InstallationRequirementsOption 900• Plug: BS 1363/A, 250 V, 10 A• PN: 8120-4420Option 901• Plug: AS/NZS 3

Keysight B1500A User’s Guide, Ed ition 14 3- 7InstallationInspection and InstallationInspection and InstallationThis section describes what to do when

3- 8 Keysight B1500A User’s Guide, Edition 14InstallationInspection and InstallationTo Perform Initial SetupAfter you receive the instrument, perform

Keysight B1500A User’s Guide, Ed ition 14 3- 9InstallationInspection and InstallationTable 3-1 Users Available Just After the Initial SetupYou can add

3- 10 Keysight B1500A User’s Guide, Edition 14InstallationInspection and InstallationTo Change GPIB AddressWhen this instrument is shipped from the fa

Keysight B1500A User’s Guide, Ed ition 14 3- 11InstallationInspection and InstallationTo Enable System ControllerTo allow Keysight B1500A/EasyEXPERT t

IEC Measurement Category IThe CE mark shows that the product complies with all applicable European Directives.The CSA mark is a registered trademar

3- 12 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesInstalling Accessories This section describes how to install the acces

Keysight B1500A User’s Guide, Ed ition 14 3- 13InstallationInstalling AccessoriesTo Connect 16442B Test Fixture (B1500A-A5F)See this section if you us

3- 14 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesTable 3-2 To Connect 16442B (B1500A-A5F)Cables 16442B Terminals B1500A

Keysight B1500A User’s Guide, Ed ition 14 3- 15InstallationInstalling AccessoriesTo Connect Connector Plate The available connector plates are listed

3- 16 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesTable 3-4 To Connect Connector PlateCables Connector PlateB1500A Termi

Keysight B1500A User’s Guide, Ed ition 14 3- 17InstallationInstalling AccessoriesTo Connect ASUKeysight E5288A Atto Sense and Switch Unit (ASU) adds t

3- 18 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesTo install ASU 1. Fix the ASU in the shielding box. The ASU must be fi

Keysight B1500A User’s Guide, Ed ition 14 3- 19InstallationInstalling AccessoriesTo connect MFCMU/4284A/ E4980A to AUXPerform the following procedure

3- 20 Keysight B1500A User’s Guide, Edition 14InstallationInstalling AccessoriesFigure 3-2 To Connect ASUFigure 3-3 To Set Shorting BarTo connect othe

Keysight B1500A User’s Guide, Ed ition 14 3- 21InstallationInstalling AccessoriesTo Connect SCUU/GSWUKeysight N1301A-100 SMU CMU Unify Unit (SCUU) is