Agilent Technologies B2200A Wartungshandbuch

Agilent Technologies Agilent B1500A Semiconductor Device AnalyzerSelf-paced Training Manual

Required Devices for Class ExercisesTo perform the class exercises, you need the device set (Agilent part number 04156-87001) which contains the follo

Module 3Data Display and Management3-28To Save Analysis ResultSelect File > Update Test ResultSelect File > Save Image As…Saves graph informatio

Module 3Data Display and Management3-29Class ExerciseUse the analysis tools.1. Use your test setup (for example, GMMAX in the Demo preset group) and p

Module 3Data Display and Management3-30To Use Preview WindowThe Data Display window provides the File > Print… function to print the graph image.

Module 3Data Display and Management3-31To Use Preview WindowThis example is result of the changes shown in the previous page.Line style was changed as

Module 3Data Display and Management3-32Class ExerciseUse the Preview window.1. Use your test record used in the previous exercise.2. Change the graph

Required Accessories for Class ExercisesTo perform the class exercises, you need the following accessories. Prepare the accessories shown below.Design

To perform the flash memory class exercise in Module 13 and if you use the ASU, you need the following accessories.To perform the flash memory class e

ContentsContents-1Module 1. Introduction• New Features• EasyEXPERT• To Perform Easy Application Test• User Interface• Modular Mainframe• SCUU/GSWU• AS

ContentsContents-2Module 3. Data Display and Management• Data Display window• Graph Analysis Tools• Data Status• To Change Graph/List/Display Setup• T

ContentsContents-3Module 5. Basic Measurement• SMU Fundamentals• Classic Test Environment• SMUs Connected in Series or Parallel• Cabling and Fixture I

ContentsContents-4Module 7. Measurement Functions• SMU Pulsed Sweep Measurement• I/V-t Sampling Measurement• Negative Hold Time for High Speed Samplin

ContentsContents-5Module 9. Modifying Application Test Definitions• To Open Application Test Definition • To Modify Test Definition • To Use Debug Too

ContentsContents-6Module 11. Advanced Definitions and Operations• To Control External GPIB Devices• To Call Execution Files• To Perform Repeat Measure

ContentsContents-7Module 13. SPGU Control and Applications• High Voltage SPGU• SPGU Control• Pulse Generator Mode• Charge Pumping• Flash Memory Test•

Notices© Agilent Technologies 2005 - 2008No part of this manual may be reproduced in any form or by any means (including electronic storage and retrie

ContentsContents-8

1Introduction

Module 1Introduction1-2In This Module• Key Features• EasyEXPERT• To Perform Easy Application Test• User Interface• Modular Mainframe• SCUU/GSWU• ASU•

Module 1Introduction1-3Comprehensive application libraryRevolutionary EasyEXPERT environmentSemi-auto prober control10 Slots variable module configura

Module 1Introduction1-4Key Features• EasyEXPERT software• Application test environment (> 200 algorithms)• Classic test environment – 415x like set

Module 1Introduction1-5EasyEXPERTMeasurementMeasurementresourcesresourcesV/I on terminalsV/I on terminalsDevice parametersDevice parametersDevice type

Module 1Introduction1-6To Perform Easy Application TestList of test recordStep 1: Click Application Test tab.Step 2: Select one or more technology cat

Module 1Introduction1-7User Interface• Touch panel• Stylus pen (option)• Rotary knob• Softkeys• USB keyboard (option)• USB mouse (option)

Module 1Introduction1-8Modular Mainframe10 module slotsB1510A HPSMUGNDU: 4.2 AN1301A-100 SCUU N1301A-200 GSWUE5288A ASUB1517A HRSMUB1511A MPSMUB1520A

Module 1Introduction1-9SCUUCMUSMU CMU Unify Unit (SCUU)SCUU cableSimple direct connectionbetween SMU/CMU and manipulators (positioners)SMUSMUGSWUForce

Module 1Introduction1-10GSWUGSWUSCUUThe GSWU must be connected to the outer conductors of the manipulators/positioners connected to the Force1/CMUH an

Module 1Introduction1-11ASU• 100 aA level sensing• Channel switching• C measurements• PG for charge pumpingTo CMU Hpot/HcurASU 2ASU 1To HRSMU 1CMU ret

Module 1Introduction1-12SMU/Pulse Generator SelectorSPGU16440A #116445A Selector Adapter16440A #2Connection Example:AC powerSMU7SMU6Digital I/OStatus

Module 1Introduction1-13B2200/E5250 Switch Control• Allows use of a probe card to facilitate probing of standardized device modules (usually 24-pin co

Module 1Introduction1-14Desktop EasyEXPERT SoftwareThe Desktop EasyEXPERT software provides the following additional advantages to the B1500A, allowin

2 Getting Started

Module 2Getting Started2-2In This Module• To Turn on/off B1500A• To Launch EasyEXPERT• To Specify/Create Workspace• To Perform Application Test• To Sa

Module 2Getting Started2-3To Turn on/off B1500AThe Standby button works to turn on the B1500A when it is turned off. When the B1500A is turned on, the

Module 2Getting Started2-4To Launch EasyEXPERTStart EasyEXPERT button/windowStart EasyEXPERT iconAfter logging on, click Start EasyEXPERT button to la

Module 2Getting Started2-5To Specify WorkspaceCase 1Case 2Case 3After launching the EasyEXPERT, you will see one of the above screens.Case 1: If this

In This ManualThis document is the self-paced training manual to help you to understand what is Agilent B1500A, what functions the B1500A has, how to

Module 2Getting Started2-6To Create Workspace1: New workspace name to createCheck this box forPublic workspace2: New workspace name to rename12Enter t

Module 2Getting Started2-7Online HelpOnline Help is available for the B1500A and EasyEXPERT. Select Help > Agilent EasyEXPERT Help menu to display

Module 2Getting Started2-8Application Test DescriptionTo know about the application test, click the ( i ) icon. This icon displays the message box th

Module 2Getting Started2-9Typical Value SelectionRight clicking this field displays the menu.The values are defined as typical values in the Test Defi

Module 2Getting Started2-10Screen KeyboardWhen you need to enter numeric characters in an entry field, you will see the icon at the right side of the

Module 2Getting Started2-11To Perform Application TestTest Record List areaStep 1: Click Application Test tab.Step 2: Select one or more technology ca

Module 2Getting Started2-12Test Result Editor• Save/Delete• !Important• # Valid• ? Questionable• Remarks• OKThe Test Result Editor provides the follow

Module 2Getting Started2-13Test Record List AreaFlagSetup NameVth gmMaxVth gmMaxVth gmMaxVth gmMaxID-VD1ID-VD1ID-VD1ID-VD1Vth gmMaxVth gmMaxID-VD1##??

Module 2Getting Started2-14Single/Append/Repeat measurementSingleRepeatAppendThe EasyEXPERT provides three execution modes, Single, Append, and Repeat

Module 2Getting Started2-15To Save/Recall Your Test SetupPreset Group name.Use this field to select preset group.My Favorite Setup buttonThe test setu

• Module 11. Advanced Definitions and OperationsThis module explains how to control external GPIB devices, how to call an execution file, how to perfo

Module 2Getting Started2-16To organize preset group for test setup My Favorite Setup buttonThis dialog box is opened by selecting the Organize Prese

Module 2Getting Started2-17To Export/Import Your Preset GroupMy Favorite SetupbuttonYou can export/import your preset group.To export the present pres

Module 2Getting Started2-18To Export/Import Test Record1.Select data record to export, and right click.2.Select Transport Data > Export As xxxx.To

Module 2Getting Started2-19Class ExercisePerform Application Test.1. Connect device (MOSFET). See the following pages.2. Open Id-Vd test definition in

Module 2Getting Started2-20SMU Triax ConnectionForce Lines to Fixture 1,2,3,4 Ports16442A/B FixtureB1500A Rear ViewSMU4SMU3SMU2SMU1CMUGNDUForce side S

Module 2Getting Started2-21Jumper Leads - MOS transistor16088-60002Dual in line package(28 pin)1 23 45678910111213141516171820192122232425272628141528

Module 2Getting Started2-22Device Orientation and InsertionInsert the transistor last, AFTER connecting the cables and leads. Remove the shorting wir

Module 2Getting Started2-23Result Example3. change3. change3. change3. change4. create5. save2. selectTest result data (record) is automatically saved

Module 2Getting Started2-24Result ExampleThis is the Id-Vd measurement result example of the following source setup.Gate voltage: 0.5 V to 2 V, 0.5 V

Module 2Getting Started2-25To Perform Quick TestSoftkeysfor single measurementStep 1: Click Quick Test tab.Step 2: Select the Preset Group.Step 3: Mar

Class Exercises Class exercises use the test setup listed below. The test setup data are only examples and included in the Demo.xpg file stored in the

Module 2Getting Started2-26To organize preset group for test setup My Favorite Setup bannerThis dialog box is opened by selecting the Organize Preset

Module 2Getting Started2-27Class ExercisePerform Quick Test.1. Use the device connection of the previous exercise. 2. Open your preset group.3. Edit y

Module 2Getting Started2-28Result ExampleNote:

Module 2Getting Started2-29To Control Switching MatrixStep 1: Click Switching Matrix button to open the Switching Matrix Operation Panel.Step 2: Enter

Module 2Getting Started2-30To organize preset group for switch setup Preset List buttonThis dialog box is opened by selecting the Organize Preset

Module 2Getting Started2-31To add switch setup to test preset groupSwitch setups can be saved in the preset group for test setups.Click the Export to

Module 2Getting Started2-32Class ExerciseAdd switch setup to test preset group.1. Create a switch setup.2. Create your switch preset group, and save y

Module 2Getting Started2-33To Manage Data Display WindowData Display > Default Data Display Properties…The Data Display Properties window is used t

Module 2Getting Started2-34To Manage Data Display WindowData Display > Manage Data Display…The Data Display Manager is used to control the appearan

Module 2Getting Started2-35TilingThis is a display example of Tiling.

NOTE Demo.xpg fileDemo.xpg file is required to create the Demo preset group which contains the test setup data used by the class exercises. And it is

Module 2Getting Started2-36StackingThis is a display example of Stacking.

Module 2Getting Started2-37OverlayingThis is a display example of Overlaying.

Module 2Getting Started2-38To tile/stack/overlay windowsStackingTilingOverlayingWhen some Data Display windows are opened, the following Windows menu

3 Data Display and Management

Module 3Data Display and Management3-2In This Module• Data Display window• Graph Analysis Tools• Data Status• To Change Graph/List/Display Setup• To S

Module 3Data Display and Management3-3Data Display windowX-Y Graph PLotParametersList DisplayThe Data Display window is opened after measurement autom

Module 3Data Display and Management3-4Graph Analysis Toolsactive line (normal line)active cursorcursormarkerline (tangent line)markerThis bar indicate

Module 3Data Display and Management3-5Graph Analysis ToolsPointerTextTextPointerText and pointer are the tools to decorate the X-Y Graph.The text is u

Module 3Data Display and Management3-6Graph Analysis ToolsLine Information:Y1 intercept and gradient of active lineLine Information:Yx intercept and g

Module 3Data Display and Management3-7Graph Analysis ToolsY1Switch Display ModeHold this layerClose this layerClose All DisplaysLayer selection tab.Th

Test Setup for Class ExercisesThe Demo preset group contains the following test setup. The setup data are only examples for the class exercises. The f

Module 3Data Display and Management3-8Graph Analysis ToolsGraph control(X value, Y1 value, Yx value)markerline (tangent line)markerGraph control:Auto

Module 3Data Display and Management3-9Graph Analysis ToolsMarker control(X value, Y1 value, Yx value)markerline (tangent line)markerMarker control:Mar

Module 3Data Display and Management3-10Graph Analysis ToolsLine controlactive line (normal line)active cursorcursormarkerline (tangent line)Line contr

Module 3Data Display and Management3-11To Enable Marker and LineMarker > Marker ON/OFFLine > Line 1 ON/OFFLine 2 ON/OFFMarker ON/OFFLine 1 &

Module 3Data Display and Management3-12To Draw Normal Line2 cursorslineLine N > NormalCursor To MarkerEnable the Normal line by clicking the Line 1

Module 3Data Display and Management3-13To Draw Gradient Line1 cursorlinegradientAdjust GradientLine N > GradientCursor To MarkerEnable the Gradient

Module 3Data Display and Management3-14To Set Gradient ValueThis is another way to draw the gradient line.Set the line 1 or 2 ON and select the gradie

Module 3Data Display and Management3-15To Draw Tangent Linemarkerlinedata curveLine N > TangentEnable the Tangent line by clicking the Line 1 (or L

Module 3Data Display and Management3-16To Draw Regression Lineline2 cursorsmeasured dataCursor To MarkerLine N > RegressionEnable the Regression li

Module 3Data Display and Management3-17To Fix a LineLine N > FixThe specified line cannot move while the Line Mode is set to Fix.To fix a line, cli

Trng List MOSFET Vth-gmmax measurement using I/V List SweepTrng Multi Multi Channel I/V Sweep (Bipolar transistor and LED)Trng Sampling 0.1 μF samplin

Module 3Data Display and Management3-18To Add Text Text > NewTo add a text, click Text > New. A text editor appears. Then enter the text you d

Module 3Data Display and Management3-19To Add PointersPointer > NewTo add a pointer, set Marker ON, click Pointer > New. A pointer and descript

Module 3Data Display and Management3-20Data StatusIf measurement unit detects any status while measurement, the status code is recorded with the measu

Module 3Data Display and Management3-21To Change Graph PropertiesThe Graph Properties dialog box is used to set the following setting of the selected

Module 3Data Display and Management3-22To Change List Display PropertiesEdit > List Display Properties…Example: -1.2345 mAExample: -1.2345678901234

Module 3Data Display and Management3-23To Change Display SetupView > Display Setup…This dialog box is used to change the graph scale and data to be

Module 3Data Display and Management3-24To See Print PreviewFile > Print Preview…The Data Display window provides the File > Print Preview… funct

Module 3Data Display and Management3-25To Print Display Databmp, emf, gif, or png formatFile > PrintFile > Save Image As…The Data Display window

Module 3Data Display and Management3-26To Copy Graph PlotPaste to WordPadYou can copy graph image to the clipboard, and paste it to a word processing

Module 3Data Display and Management3-27To Copy List DataPaste to NotepadOpen by a spreadsheet softwareYou can copy the data list to the clipboard, and