Offset current: < 0.1 pA
1
(Low Leakage I-V Port)
< 1000 pA
1
(General I-V Port)
Channel Crosstalk Capacitance: < 0.3 pF/ch
Offset voltage, Electro Motive
Force (EMF) at 5 min.: < 80 µV (Low Leakage I-V Port)
< 110 µV (General I-V Port)
< 110 µV (C-V, HF Port)
Guard Capacitance: < 145 pF
2
(Low Leakage I-V Port)
< 123 pF
2
(General I-V Port)
Additional C measurement Error < ±1% ±0.5 pF
3
(C-V Port)
Bandwidth (at -3 dB) < 10 MHz (C-V, HF Port)
Relay Contact Life: > 10
8
times (Dry Switching Mode)
Settling Time: < 3.5 sec to < 0.4 pA (Low Leakage I-V Port)
after 10 V applied
!"#$
Condition A B C
Max. Current rating (A): 1.0 - -
Max. Voltage rating (V)
Channel to Ground: 200 - -
Channel to Channel: 300 - -
Close Ch Residual R ()
Low Leakage I-V Port: 0.6 - -
Bias Port: 1.0 - -
Ch Isolation R ()
Low Leakage I-V Port: 10
13
5 x 10
12
2 x 10
12
Bias Port: 10
9
5 x 10
8
2 x 10
8
Condition A: 23º C ± 5º C, 5% to 60% RH
Condition B: 5º C to 18º C, 28º C to 40º C, 5% to 60% RH
Condition C: 28º C to 40º C, 60% to 80% RH
*This specification is defined with the module plugged into the mainframe.
Offset current: < 0.1 pA
4
(Low Leakage I-V Port)
Channel Crosstalk Capacitance: < 0.4 pF/ch (Low Leakage I-V Port)
< 5 pF/ch (Bias Port)
Offset voltage (EMF) at 5 min.: < 80 µV (Low Leakage I-V Port)
Guard Capacitance: < 180 pF
5
(Low Leakage I-V Port)
< 60 pF (Low Leakage I-V Port,
when the port is open)
Relay Contact Life: > 10
8
times (Dry Switching Mode)
Settling Time < 3.5 sec to < 0.4 pA (Low Leakage I-V Port)
after 10 V applied
1
The offset current when zero volts are applied to all input and output channels
2
The guard capacitance of the closed port on input and output ports when one module per frame is installed
3
The additional error using the C-Compensation program at 1 kHz ~ 1 MHz, < 1000 pF
4
When zero volts are applied to all input and output channels
5
The guard capacitance of the closed port on input and output ports when one module per frame is installed
(28 Seiten)
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